A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

The invention relates to a cathode for an X-ray tube and a corresponding method for assembly. The cathode comprises a filament (22), at least two support structures (21), a body structure comprising a recess for the filament. The filament is provided to emit electrons towards an anode in an electron emitting direction (25). The filament is held by the support structures, which are fixedly connected to the body structure. The filament is totally recrystallized before assembly and has an at least partial helical structure. The support structures comprise a reception end (24) for releasably receiving two ends of the filament by means of a locking mechanism and the complete alignment of the filament and the recess is given by the geometry of the filament, the at least two support structures and the body structure which comprises a recess for the filament. An improved and facilitated cathode assembly with increased reliability of the precision of the positioning in operation is achieved.

The invention relates to a cathode for an X-ray tube and a corresponding method for assembly. The cathode comprises a filament (22), at least two support structures (21), a body structure comprising a recess for the filament. The filament is provided to emit electrons towards an anode in an electron emitting direction (25). The filament is held by the support structures, which are fixedly connected to the body structure. The filament is totally recrystallized before assembly and has an at least partial helical structure. The support structures comprise a reception end (24) for releasably receiving two ends of the filament by means of a locking mechanism and the complete alignment of the filament and the recess is given by the geometry of the filament, the at least two support structures and the body structure which comprises a recess for the filament. An improved and facilitated cathode assembly with increased reliability of the precision of the positioning in operation is achieved.

A device for controlling electron flow is provided. The device comprises a cathode, an elongate electrical conductor embedded in a diamond substrate, an anode, and a control electrode provided on the substrate surface for modifying the electric field in the region of the end of the conductor. A method of manufacturing the device is also provided.

A device for controlling electron flow is provided. The device comprises a cathode, an elongate electrical conductor embedded in a diamond substrate, an anode, and a control electrode provided on the substrate surface for modifying the electric field in the region of the end of the conductor. A method of manufacturing the device is also provided.

Methods for fabricating gas discharge tubes. In some embodiments, a method for fabricating a gas discharge tube (GDT) device can include providing or forming an insulator substrate having first and second sides and defining an opening. The method can further include providing or forming a first electrode and a second electrode. The method can further include forming a first glass seal between the first electrode and the first side of the insulator substrate, and a second glass seal between the second electrode and the second side of the insulator substrate, such that the first and second glass seals provide a hermetic seal for a chamber defined by the opening and the first and second electrodes.

A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.

Provided are an on-chip miniature X-ray source and a method for manufacturing the same. The on-chip miniature X-ray source includes: an on-chip miniature electron source; a first insulating spacer provided on an electron-emitting side of the on-chip miniature electron source, where the first insulating spacer has a cavity structure; and an anode provided on the first insulating spacer, where a closed vacuum cavity is formed between the on-chip miniature electron source and the anode. The on-chip miniature X-ray source has the advantages of stable X-ray dose, low working requirements for vacuum, fast switch response, capability of integration and batch fabrication, and can be used in various types of small and portable X-ray detection, analysis and treatment devices.

Provided are an on-chip miniature X-ray source and a method for manufacturing the same. The on-chip miniature X-ray source includes: an on-chip miniature electron source; a first insulating spacer provided on an electron-emitting side of the on-chip miniature electron source, where the first insulating spacer has a cavity structure; and an anode provided on the first insulating spacer, where a closed vacuum cavity is formed between the on-chip miniature electron source and the anode. The on-chip miniature X-ray source has the advantages of stable X-ray dose, low working requirements for vacuum, fast switch response, capability of integration and batch fabrication, and can be used in various types of small and portable X-ray detection, analysis and treatment devices.