A method of making a metallic article includes forming a workpiece body from a bulk metallic material, forming a metallic oxide layer from the bulk metallic material overlaying the bulk metallic material by exposing the bulk metallic material to ozone (O.sub.3), and depositing a ceramic layer onto the metallic oxide layer. The bulk metallic material includes one of aluminum and nickel, and metallic articles and semiconductor processing systems including metallic articles are also described.

A method of providing a stable connector used in a deposition apparatus is presented. The method may comprise forming a dome-shaped electrode connector inside of a ceramic material, drilling out a part of the ceramic material along with a portion of the dome-shaped electrode connector to flatten the electrode connector; and bonding a rod into a remaining part of the electrode connector. The method would provide a stable electrode connector which could hold the entire length of the rod which is bonded onto it. The length of the flattened electrode connector could be 5 mm.