A first member made of an insulating material and a jig with a protrusion narrowing toward a distal end side are prepared, and at least one of the first member and the jig is heated to a temperature at which the first member can melt and deform. After the jig is brought into contact with the first member with the first member and the plurality of protrusions facing each other, the jig is removed, and an intermediate body is formed including the first member formed with a plurality of recesses, and a plurality of conductive members passing through the first member and projecting into the recesses. A second member is prepared, openings of the plurality of recesses are closed, and the second member is hermetically joined to the intermediate body to form a plurality of internal spaces where electron is emitted, and forming a joined body.

A first member made of an insulating material and a jig with a protrusion narrowing toward a distal end side are prepared, and at least one of the first member and the jig is heated to a temperature at which the first member can melt and deform. After the jig is brought into contact with the first member with the first member and the plurality of protrusions facing each other, the jig is removed, and an intermediate body is formed including the first member formed with a plurality of recesses, and a plurality of conductive members passing through the first member and projecting into the recesses. A second member is prepared, openings of the plurality of recesses are closed, and the second member is hermetically joined to the intermediate body to form a plurality of internal spaces where electron is emitted, and forming a joined body.

A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.

A drift tube construction includes a thin wall aluminum tube with a thin wire at its center attached to a terminal. The tube is plugged at both ends. The terminal is embedded at the center of the plug with material insulating it from Drift tube main body. The Drift tube assembly is sealed and filled with a gas mixture. A voltage is applied to the thin wire via the terminal. Current drift tubes employ plastic material to insulate the terminal from Drift tube main body and O-rings to provide a near hermetic seal.

A drift tube construction includes a thin wall aluminum tube with a thin wire at its center attached to a terminal. The tube is plugged at both ends. The terminal is embedded at the center of the plug with material insulating it from Drift tube main body. The Drift tube assembly is sealed and filled with a gas mixture. A voltage is applied to the thin wire via the terminal. Current drift tubes employ plastic material to insulate the terminal from Drift tube main body and O-rings to provide a near hermetic seal.

The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member.

Some embodiments include a structure, comprising: an insulator forming at least a part of a wall of a vacuum chamber, the insulator having a first end and a second end wider than the first end; a first conductive structure disposed at the first end of the insulator; and a second conductive structure disposed at the second end of the insulator, contacting the insulator, and including at least a portion surrounded by the insulator; wherein: a portion of an outer surface of the insulator extends radially outward from a triple junction between the insulator, the second conductive structure, and a medium contacting the outer surface of the insulator.

A plasma lamp includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located on the surface of each plate. At least one electrode is located on an exterior surface of at least one interior plate. Optionally, protective windows may be placed over the electrodes. The application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates (when present). The glow discharge plasma efficiently and uniformly emits UV/VUV radiation over the entire surface of the lamp.

A gasket assembly for use in a UV lamp system is provided. The gasket assembly includes an RF screen, and an elastomeric gasket material affixed to the RF screen.

A drift tube construction includes a thin wall aluminum tube with a thin wire at its center attached to a terminal. The tube is plugged at both ends. The terminal is embedded at the center of the plug with material insulating it from Drift tube main body. The Drift tube assembly is sealed and filled with a gas mixture. A voltage is applied to the thin wire via the terminal. Current drift tubes employ plastic material to insulate the terminal from Drift tube main body and O-rings to provide a near hermetic seal.