Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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H01J37/26
Electron or ion microscopes; Electron or ion diffraction tubes
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H01J37/29

REFLECTANCE CONFOCAL SCANNING ELECTRON MICROSCOPE AND OPERATING METHOD THEREOF
20250266237 · 2025-08-21 ·

A reflectance confocal scanning electron microscope according to of the present inventive concept may include, a first column device configured to allow an electron beam to be incident on a sample, and a second column device configured to de-scan the electron beam after it is reflected from the sample to confocally detect electrons emitted from the sample.