The present disclosure generally relates in certain embodiments to the creation of ionized molecules, e.g., for detection in a mass spectrometer, or for other uses such as lithography, sputtering machines, propulsion etc. Some embodiments include an ion source comprising a capillary tip that may allow for direct ion evaporation of samples with an applied electric field. In some cases, the tip may have an opening with a cross-section less than 100 nm. In addition, certain aspects are directed to using a capillary tip that allow for detection of samples (e.g. amino acids), and in some cases allows for sequencing. For instance, some embodiments are directed to allowing single ions and ionic clusters to be evaporated at a high rate directly from aqueous samples in a mass spectrometer. Other aspects are directed to methods for making or using such ionized molecules, methods for making or using devices to create such ionized molecules, or the like.

A device for trapping ions includes: a first substrate having an upper multi-layer electrode structure implemented at a top side of the first substrate; a second substrate disposed over the first substrate and having a lower multi-layer electrode structure implemented at a bottom side of the second substrate; and one or more first level ion traps configured to trap ions in a space between the first substrate and the second substrate. The one or more first level ion traps includes the upper multi-layer electrode structure of the first substrate and the lower multi-layer electrode structure of the second substrate. A method of controlling trapped ions in a device is also described.

Devices, methods, and systems for enclosures for an ion trapping device are described herein. One enclosure for an ion trapping device includes a heat spreader base that includes a plurality of apertures. The ion trapping device may also include a grid array having a plurality of pins extending outward from a surface of the grid array. The apertures of the heat spreader base may be arranged such that the plurality of pins passes through the plurality of apertures.

A device for controlling trapped ions includes a first semiconductor substrate. A second semiconductor substrate is disposed over the first semiconductor substrate. At least one ion trap is configured to trap ions in a space between the first semiconductor substrate and the second semiconductor substrate. A spacer is disposed between the first semiconductor substrate and the second semiconductor substrate, the spacer including an electrical interconnect which electrically connects a first metal layer structure of the first semiconductor substrate to a second metal layer structure of the second semiconductor substrate.

A device for controlling trapped ions includes a first substrate. A second substrate is disposed over the first substrate. One or a plurality of first level ion traps is configured to trap ions in a space between the first substrate and the second substrate. One or a plurality of second level ion traps is configured to trap ions in a space above the second substrate. An opening in the second substrate is provided through which ions can be transferred between a first level ion trap and a second level ion trap.

A method of manufacture for a ion mobility filter is disclosed. The method of manufacturing an ion filter for a spectrometry system includes providing a sheet of conductive material and defining a plurality of ion filters on the sheet. The definition of the plurality of ion filters is achieved by forming an electrode layer for each ion filter on the sheet, where each electrode layer comprises at least one ion channel and an isolation channel surrounding the at least one ion channel. A support layer on each electrode layer is also formed. Each support layer comprises an aperture at least partially aligned with the at least one ion channel. The ion filter is then separated. The risk of contaminants entering the at least one ion channel when separating the ion filters is reduced by surrounding the at least one ion channel with the isolation channel.

A method for producing an atom trap (20) comprising the steps: (a) applying an electrically conductive starting layer (2) onto a substrate (1), (b) applying at least one electric conductor element (4) to the starting layer (2) by means of electro-chemical deposition and/or a lift-off method, (c) applying at least one contacting element (6) by means of electro-chemical deposition and/or a lift-off method, such that the at least one contacting element (6) is connected to the at least one electric conductor element (4) in an electrically conductive manner, (d) removing the starting layer (2) in regions in which no electric conductor element (4) has been applied, (e) applying an insulation layer (7) that at least partially covers the at least one electric conductor element (4) and the at least one contacting element (6), (f) planarizing the insulation layer (7) and exposing the at least one contacting element (6), and (g) applying at least one additional electric conductor (14) element by means of electro-chemical deposition and/or a lift-off method, such that the at least one additional electric conductor element (14) is connected to the at least one contacting element (6) in an electrically conductive manner.

The invention relates to a device (10) for extracting volatile species from a liquid (20) connected to an inlet of an analysis instrument, such as a mass spectrometer (MS). The device has a chamber (4), a membrane (5) forming a barrier for the liquid at zero differential pressure between the inside and the outside of the chamber, and allowing passage of the volatile species at zero differential pressure between the inside and the outside of the chamber. The device has an inlet capillary channel (3) to feed in a carrier gas and prevent back-diffusion from the chamber, and an outlet capillary channel (6) which provides a significant pressure reduction, e.g. from atmospheric pressure in the chamber (4) to near-vacuum suitable for an MS. The invention combines the best of two worlds, i.e. the fast time-response of a DEMS system and the high sensitivity of a MIMS system, since a differential pumping stage is not needed.

Apparatuses, systems, and methods for ion traps are described herein. One apparatus includes a number of microwave (MW) rails and a number of radio frequency (RF) rails formed with substantially parallel longitudinal axes and with substantially coplanar upper surfaces. The apparatus includes two sequences of direct current (DC) electrodes with each sequence formed to extend substantially parallel to the substantially parallel longitudinal axes of the MW rails and the RF rails. The apparatus further includes a number of through-silicon vias (TSVs) formed through a substrate of the ion trap and a trench capacitor formed in the substrate around at least one TSV.

Systems and methods for loading microfabricated ion traps are disclosed. Photo-ablation via an ablation pulse is used to generate a flow of atoms from a source material, where the flow is predominantly populated with neutral atoms. As the neutral atoms flow toward the ion trap, two-photon photo-ionization is used to selectively ionize a specific isotope contained in the atom flow. The velocity of the liberated atoms, atom-generation rate, and/or heat load of the source material is controlled by controlling the fluence of the ablation pulse to provide high ion-trapping probability while simultaneously mitigating generation of heat in the ion-trapping system that can preclude cryogenic operation. In some embodiments, the source material is held within an ablation oven comprising an electrically conductive housing that is configured to restrict the flow of agglomerated neutral atoms generated during photo-ablation toward the ion trap.