Patent classifications
H01J49/46
Harmonic line noise correction for electron energy loss spectrometer
Electron Energy Loss Spectrometer including a correction circuit for fundamental and third harmonic line noise is described. Various circuits for creating the correction signals are also described. A method of correcting for fundamental and third harmonic line noise is also described.
METHOD AND SYSTEM FOR DETERMINING ENERGY SPECTRUM OF X-RAY DEVICE
The present disclosure discloses a method and a system for determining an energy spectrum of an incident electron beam. The method includes obtaining a plurality of deflection currents of a beam deflection device; for each of the plurality of deflection currents, determining an energy range of an ejected electron beam, and determining a target current of a target generated by the ejected electron beam irradiating the target, wherein the ejected electron beam is emitted from an output of the beam deflection device after the incident electron beam enters the beam deflection device. The method also includes determining the energy spectrum of the incident electron beam based on the energy ranges of the plurality of ejected electron beams and the corresponding target currents.
Imaging mass spectrometer
A time-of-flight mass spectrometer is disclosed comprising ion optics that map an array of ions at an ion source array (71) to a corresponding array of positions on a position sensitive ion detector (79). The ion optics include at least one gridless ion mirror (76) for reflecting ions, which may compensate for various aberrations and allows the spectrometer to have relatively high mass and spatial resolutions.
HYBRID ION MOBILITY SPECTROMETER
A hybrid ion mobility spectrometer includes a single-pass drift tube having an ion inlet and an ion outlet, a multiple-pass drift tube having an ion inlet and an ion outlet each coupled to the single pass drift tube between the ion inlet and the ion outlet thereof, and at least one ion steering channel controllable to selectively pass ions traveling through the single-pass drift tube into the multiple-pass drift tube via the ion inlet of the multiple-pass drift tube and to selectively pass ions traveling through the multiple-pass drift tube into the single-pass drift tube via the ion outlet of the multiple-pass drift tube. The single-pass drift tube separates in time ions traveling therethrough according to a first function of ion mobility, and the multiple-pass drift tube separates in time ions traveling one or more times therethrough according to the first or a second function of ion mobility.
HYBRID ION MOBILITY SPECTROMETER
A hybrid ion mobility spectrometer includes a single-pass drift tube having an ion inlet and an ion outlet, a multiple-pass drift tube having an ion inlet and an ion outlet each coupled to the single pass drift tube between the ion inlet and the ion outlet thereof, and at least one ion steering channel controllable to selectively pass ions traveling through the single-pass drift tube into the multiple-pass drift tube via the ion inlet of the multiple-pass drift tube and to selectively pass ions traveling through the multiple-pass drift tube into the single-pass drift tube via the ion outlet of the multiple-pass drift tube. The single-pass drift tube separates in time ions traveling therethrough according to a first function of ion mobility, and the multiple-pass drift tube separates in time ions traveling one or more times therethrough according to the first or a second function of ion mobility.
HARMONIC LINE NOISE CORRECTION FOR ELECTRON ENERGY LOSS SPECTROMETER
Electron Energy Loss Spectrometer including a correction circuit for fundamental and third harmonic line noise is described. Various circuits for creating the correction signals are also described. A method of correcting for fundamental and third harmonic line noise is also described.
Apparatus and method for measuring energy of electrons
Electrons excited by irradiation of a visible light to a sample is at an energy level lower than a vacuum level, thus photoelectrons are not emitted from the sample and energy of excited electrons cannot be measured. The visible light is irradiated to the sample through a mesh electrode. A surface film for reducing the vacuum level is formed on a surface of the sample. With the surface film being formed, photoelectrons are obtained by the visible light, and these photoelectrons are accelerated by the mesh electrode toward a photoelectron spectrometer. Ultraviolet light may be irradiated to the sample and metal having same potential therewith. In this case, the mesh electrode is set at a retracted position to prohibit interaction of the mesh electrode and the ultraviolet light. A difference between the valence band and the Fermi level of the sample can be measured.
Apparatus and method for measuring energy of electrons
Electrons excited by irradiation of a visible light to a sample is at an energy level lower than a vacuum level, thus photoelectrons are not emitted from the sample and energy of excited electrons cannot be measured. The visible light is irradiated to the sample through a mesh electrode. A surface film for reducing the vacuum level is formed on a surface of the sample. With the surface film being formed, photoelectrons are obtained by the visible light, and these photoelectrons are accelerated by the mesh electrode toward a photoelectron spectrometer. Ultraviolet light may be irradiated to the sample and metal having same potential therewith. In this case, the mesh electrode is set at a retracted position to prohibit interaction of the mesh electrode and the ultraviolet light. A difference between the valence band and the Fermi level of the sample can be measured.
Space ion analyzer with mass spectrometer on a chip (MSOC) using floating MSOC voltages
A space ion analyzer in a spacecraft includes an axis and an aperture to receive an ion stream. An ion focuser to focus the ion stream along the axis responsive to a focus voltage, and an ion deflector deflects ions from the axis based on energies of the ions and a deflector voltage difference applied across plates of the ion deflector. A mass spectrometer on a chip (MSOC) directs ions from the ion deflector to an ion detector array responsive to an MSOC voltage difference applied to the MSOC. A focus voltage generator generates the focus voltage as a variable voltage referenced to a spacecraft ground. A deflector voltage generator generates the deflector voltage difference with a controllable magnitude and referenced to the spacecraft ground. An MSOC voltage generator generates the MSOC voltage difference with a controllable magnitude and referenced to a breaking potential controllable relative to the spacecraft ground.
SPACE ION ANALYZER WITH MASS SPECTROMETER ON A CHIP (MSOC) USING FLOATING MSOC VOLTAGES
A space ion analyzer in a spacecraft includes an axis and an aperture to receive an ion stream. An ion focuser to focus the ion stream along the axis responsive to a focus voltage, and an ion deflector deflects ions from the axis based on energies of the ions and a deflector voltage difference applied across plates of the ion deflector. A mass spectrometer on a chip (MSOC) directs ions from the ion deflector to an ion detector array responsive to an MSOC voltage difference applied to the MSOC. A focus voltage generator generates the focus voltage as a variable voltage referenced to a spacecraft ground. A deflector voltage generator generates the deflector voltage difference with a controllable magnitude and referenced to the spacecraft ground. An MSOC voltage generator generates the MSOC voltage difference with a controllable magnitude and referenced to a breaking potential controllable relative to the spacecraft ground.