A light source apparatus (100) includes: a chamber (101) having a chamber wall (103) defining an opening (107); and a support apparatus (110) including a support device (111) positioned within the opening of the chamber wall. The support device includes: a cup (112) having an inner surface (114) configured to retain a movable apparatus and an outer surface (116) having a first outer diameter; and a plurality of rods (118) arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.

A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.

An aspect of some embodiments of the present invention relates to a plasma chamber for containing a solution electrode glow discharge (SEGD) apparatus, the plasma chamber comprising a hollow body and a lens. The hollow body is configured to enclose a plasma generated between a solid electrode and a solution electrode, and includes at least one viewing port for letting light generated from the plasma leave the hollow body. The lens is disposed at or near the viewing port, the lens being configured to collect light from the plasma and direct the light onto a light receiving unit.

An extreme ultraviolet light source apparatus includes a disc-shaped cathode rotating about an axis, a disc-shaped anode rotating about an axis, an energy beam irradiation device irradiating a plasma raw material on the cathode with an energy beam to vaporize the plasma raw material, a power supply for causing a discharge between the cathode and the anode for generating a plasma in the gap between the cathode and the anode to emit extreme ultraviolet light, and an irradiation position adjusting mechanism for adjusting a position at which the cathode is irradiated with the energy beam. The cathode, the anode, and the irradiation position adjusting mechanism are accommodated in a housing. A photography device is disposed outside the housing and is configured to photograph a visible-light image of a vicinity of the cathode and the anode, the vicinity including visible light emitted from the plasma.

An illumination source includes a laser driver unit configured to emit a plasma sustaining beam. An ingress collimator receives the plasma sustaining beam and produces a collimated ingress beam. A focusing optic receives the collimated ingress beam and produce a focused sustaining beam. A sealed lamp chamber contains an ionizable media that, once ignited, forms a high intensity light emitting plasma having a waist size smaller than 150 microns. The sealed lamp chamber further includes an ingress window configured to receive the focused sustaining beam and an egress window configured to emit the high intensity light. An ignition source is configured to ignite the ionizable media, and an exit fiber is configured to receive and convey the high intensity light. The high intensity light is white light with a black body spectrum, and the exit fiber has a diameter in the range of 200-500 micrometers.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

An excimer lamp includes light-emitting gases containing krypton gas and chlorine gas in a sealing body composed of fused quartz glass having an absorption band at least in a wavelength band of 240 nm to 260 nm. An ultraviolet light irradiation device includes: an excimer lamp having light-emitting gases containing krypton gas and chlorine gas in a sealing body; a housing having an extraction part for extracting ultraviolet light emitted from an excimer lamp; and fused quartz glass disposed in the extraction part and having an absorption band at least in a wavelength band of 240 nm to 260 nm.

The present application discloses an ultraviolet lamp tube and a novel gas discharge UV lamp, which, through unique coating methods, can ensure monochromaticity of light output of the light source, while increasing the luminous angle of the ultraviolet lamp tube, thus effectively improving the light efficiency, simplifying structure, and greatly reducing production costs.

The invention describes a gas-discharge lamp comprising an inner vessel enclosing a pair of electrodes separated by a gap; and an outer vessel enclosing the inner vessel; and wherein the lamp comprises a lateral stripe arranged on the surface of a vessel such that the lateral stripe lies below a horizontal plane through a longitudinal axis through the center of the lamp, and wherein the lateral stripe extends essentially only over a region corresponding to the gap between the electrodes.

A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.