H01J61/04

IRRADIATION DEVICE WITH EXCIMER EMITTERS AS UV SOURCE

An irradiation device includes a housing, reflectors arranged on sides of the housing, an excimer emitter as a UV radiation source, porous sintered metal distributor elements, a chamber acting as a buffer volume, a high-voltage socket, an earth connection, and an emitter head having holes. The excimer emitter has an inner electrode and an outer electrode. The distributor elements are arranged along the excimer emitter. The emitter head is provided as a molded body to accommodate the inner electrode and the outer electrode. The emitter head form-fittingly guides the inner electrode and the outer electrode to the high-voltage socket and/or to the earth connection, and provides a supply of deionized cooling water to an inner cooling channel and to an outer cooling channel via the holes to cool the excimer emitter. A nitrogen flushing takes place via the distributor elements and the chamber.

IRRADIATION DEVICE WITH EXCIMER EMITTERS AS UV SOURCE

An irradiation device includes a housing, reflectors arranged on sides of the housing, an excimer emitter as a UV radiation source, porous sintered metal distributor elements, a chamber acting as a buffer volume, a high-voltage socket, an earth connection, and an emitter head having holes. The excimer emitter has an inner electrode and an outer electrode. The distributor elements are arranged along the excimer emitter. The emitter head is provided as a molded body to accommodate the inner electrode and the outer electrode. The emitter head form-fittingly guides the inner electrode and the outer electrode to the high-voltage socket and/or to the earth connection, and provides a supply of deionized cooling water to an inner cooling channel and to an outer cooling channel via the holes to cool the excimer emitter. A nitrogen flushing takes place via the distributor elements and the chamber.