A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.

An excimer bulb assembly, with an excimer bulb, at least one integral captured reflector, and an integral filter such that the excimer bulb only emits substantial UV radiation between 200 nm and 230 nm, using a filter that passes light from about 200 nm to 234 nm (+/−2 nm).

An excimer bulb assembly, with an excimer bulb, at least one integral captured reflector, and an integral filter such that the excimer bulb only emits substantial UV radiation between 200 nm and 230 nm, using a filter that passes light from about 200 nm to 234 nm (+/−2 nm).

Apparatus, systems, and methods for processing workpieces are provided. An arc lamp can include a tube. The arc lamp can include one or more inlets configured to receive water to be circulated through the arc lamp during operation as a water wall, the water wall configured to cool the arc lamp. The arc lamp can include a plurality of electrodes configured to generate a plasma in a forming gas introduced into the arc lamp via the one or more inlets. The forming gas can be or can include a mixture of a hydrogen gas and an inert gas, the hydrogen gas in the mixture having a concentration less than 4% by volume. The hydrogen gas can be introduced into the arc lamp prior to generating the plasma. The arc lamp may be used for processing workpieces.

An excimer bulb assembly including a krypton/chlorine excimer bulb and a pass filter. The excimer bulb assembly does not emit substantial UV C radiation in wavelengths longer than deadly 240 nm through UV C wavelengths. The pass filter is adapted to block substantial UV C radiation in wavelengths in the range of 240 nm-280 nm. The assembly may include a captured reflector, a smart chip, and/or a heat sink. The bulb and its electrical connectors may form a cartridge. The assembly may include a housing and the cartridge may swivel in the housing.

An excimer bulb assembly including a krypton/chlorine excimer bulb and a pass filter. The excimer bulb assembly does not emit substantial UV C radiation in wavelengths longer than deadly 240 nm through UV C wavelengths. The pass filter is adapted to block substantial UV C radiation in wavelengths in the range of 240 nm-280 nm. The assembly may include a captured reflector, a smart chip, and/or a heat sink. The bulb and its electrical connectors may form a cartridge. The assembly may include a housing and the cartridge may swivel in the housing.

At least one of the electrodes of a discharge lamp, including at an interior of a main body of the electrode: a heat-transmitting substance of the melting point lower than that of a material which makes up the main body; and a regulating body that is made up of a material of the melting point higher than that of the heat-transmitting substance, that includes a blade which extends in the axial direction and in a radial direction perpendicular to the axial direction, and that regulates convection of the heat-transmitting substance. Surface roughness Rz of at least one of a region which is on an inner wall face of the main body and with which the regulating body makes contact and a region which is on a surface of the regulating body and with which the inner wall face makes contact is not greater than 1.52 μm.

A mercury discharge lamp includes: a discharge tube having encapsulated therein mercury in the form of an amalgam; and a temperature control member that controls an ambient temperature of the amalgam in such a manner as to compensate for a change in the ambient temperature of the amalgam. The temperature control member may include a bimetal supporting the amalgam at a predetermined position, and the support member is formed or constituted by a bimetal. By the bimetal deforming in response to a change in the ambient temperature of the amalgam, the temperature control member changes a spaced-apart distance of the amalgam to a filament within the discharge tube and thereby changes an influence of heat generation by the filament on the amalgam. The temperature control member may include, near the amalgam, a resistance element whose resistance value changes in response to a temperature to control heat generation thereby.

A mercury discharge lamp includes: a discharge tube having encapsulated therein mercury in the form of an amalgam; and a temperature control member that controls an ambient temperature of the amalgam in such a manner as to compensate for a change in the ambient temperature of the amalgam. The temperature control member may include a bimetal supporting the amalgam at a predetermined position, and the support member is formed or constituted by a bimetal. By the bimetal deforming in response to a change in the ambient temperature of the amalgam, the temperature control member changes a spaced-apart distance of the amalgam to a filament within the discharge tube and thereby changes an influence of heat generation by the filament on the amalgam. The temperature control member may include, near the amalgam, a resistance element whose resistance value changes in response to a temperature to control heat generation thereby.

A device for emitting ultraviolet light includes at least one excimer lamp and a housing for the excimer lamp(s). Each excimer lamp has a discharge vessel filled with light-emitting gases, and a pair of first and second electrodes that are placed in contact with the discharge vessel and produce a dielectric barrier discharge inside the discharge vessel. The housing is made of an insulating and heat-resistant resin material. The housing is configured to house the excimer lamp(s), and has a light-emitting window that allows light with a center wavelength in a range from 200 nm to 230 nm emitted from the excimer lamp(s) to exit from the housing.