Patent classifications
H01J61/54
Laser driven sealed beam lamp with improved stability
A sealed high intensity illumination device configured to receive a laser beam from a laser light source and method for making the same are disclosed. The device includes a sealed cylindrical chamber configured to contain an ionizable medium. The chamber has a cylindrical wall, with an ingress and an egress window disposed opposite the ingress window. A tube insert is disposed within the chamber formed of an insulating material. The insert is configured to receive the laser beam within the insert inner diameter.
Radiation source, metrology apparatus, lithographic system and device manufacturing method
A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.
Radiation source, metrology apparatus, lithographic system and device manufacturing method
A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.
System for portable gas storage and delivery
A system (2) for storing and delivering a gas includes a container (4), a porous absorbent material (7) provided within the container, the porous absorbent material storing the gas in a concentrated form, and an adapter assembly (6) structured to be coupled to the container. The adapter assembly is structured to enable the gas to be extracted from the container and delivered to an individual through a cannula or the like.
System for portable gas storage and delivery
A system (2) for storing and delivering a gas includes a container (4), a porous absorbent material (7) provided within the container, the porous absorbent material storing the gas in a concentrated form, and an adapter assembly (6) structured to be coupled to the container. The adapter assembly is structured to enable the gas to be extracted from the container and delivered to an individual through a cannula or the like.
Method of Using Refractory Metal Arc Electrodes in Sulfur-Containing Plasma Gases and Sulfur Arc Lamp Based on Same
Sulfur arc lamp includes an arc chamber that has a cathode and an anode both made of refractory metals that include pure tungsten, pure molybdenum, tungsten alloy, molybdenum alloy or a composite in which tungsten is at least 90%, or a composite in which molybdenum is at least 90%; a plasma initiation gas filling the plasma chamber; power supply configured to switch on and off electric arc discharge between the cathode and anode; second chamber connected to the arc chamber for releasing sulfur vapor into the plasma arc chamber, thereby creating a sulfur-containing plasma gas when the discharge occurs, and configured to selectively remove the sulfur vapor from the sulfur-containing plasma gas when the discharge occurs, wherein the second chamber is configured to reduce a concentration of the sulfur vapor in the arc chamber below 10.sup.13 molecules per cm.sup.3 before the electric arc discharge is off.
Method of Using Refractory Metal Arc Electrodes in Sulfur-Containing Plasma Gases and Sulfur Arc Lamp Based on Same
Sulfur arc lamp includes an arc chamber that has a cathode and an anode both made of refractory metals that include pure tungsten, pure molybdenum, tungsten alloy, molybdenum alloy or a composite in which tungsten is at least 90%, or a composite in which molybdenum is at least 90%; a plasma initiation gas filling the plasma chamber; power supply configured to switch on and off electric arc discharge between the cathode and anode; second chamber connected to the arc chamber for releasing sulfur vapor into the plasma arc chamber, thereby creating a sulfur-containing plasma gas when the discharge occurs, and configured to selectively remove the sulfur vapor from the sulfur-containing plasma gas when the discharge occurs, wherein the second chamber is configured to reduce a concentration of the sulfur vapor in the arc chamber below 10.sup.13 molecules per cm.sup.3 before the electric arc discharge is off.
High-Power Short-Pass Total Internal Reflection Filter
An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
High-Power Short-Pass Total Internal Reflection Filter
An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
Gas-discharge lamp for a vehicle headlamp
The invention describes a gas-discharge lamp comprising an inner vessel enclosing a pair of electrodes separated by a gap; and an outer vessel enclosing the inner vessel; and wherein the lamp comprises a lateral stripe arranged on the surface of a vessel such that the lateral stripe lies below a horizontal plane through a longitudinal axis through the center of the lamp, and wherein the lateral stripe extends essentially only over a region corresponding to the gap between the electrodes.