A method of calibrating a spectrophotometer comprising a flash lamp. The method comprises receiving light from the flash lamp at a monochromator of the spectrometer, wherein the flash lamp is a short arc noble gas flash lamp with transverse or axially aligned electrodes; configuring the monochromator to progressively transmit the received light at each of a plurality wavelengths N of a selected range of wavelengths, wherein the range of wavelengths is associated with a wavelength feature according to a known spectral profile of the flash lamp, and wherein the wavelength feature is a self-absorption feature; and determining a spectrum of the flash lamp, wherein the spectrum comprises a corresponding power or intensity value for each of the plurality of wavelengths. The method further comprises determining a wavelength calibration error value for the wavelength feature by comparing the spectrum with a segment of a predetermined reference spectrum associated with the flash lamp, wherein the segment of the predetermined reference

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted.

A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

In an example, a method of operating an ultraviolet (UV) light source includes providing a supply power to the UV light source, and activating, using the supply power, the UV light source to emit UV light during a series of activation cycles. The method also includes, during at least one activation cycle in the series, sensing the UV light emitted by the UV light source to measure an optical parameter of the UV light. The optical parameter is related to an antimicrobial efficacy of the UV light. The method further includes adjusting, based on the measured optical parameter, an electrical parameter of the supply power to maintain a target antimicrobial efficacy of the UV light over the series of activation cycles.

A flash irradiation device includes: a light-emitting tube sealing a light-emitting gas inside; a pair of discharging electrodes being arranged distant from each other in the first direction; a reflecting member that is disposed on an opposite side of the light-emitting tube from the workpiece; a pair of trigger electrodes on an outer wall surface of the light-emitting tube or in a vicinity of the light-emitting tube, the pair of the trigger electrodes being arranged distant from each other in the first direction; a lighting circuit connected to the pair of the discharging electrodes, the lighting circuit being configured to supply electric power between the pair of the discharging electrodes; and a trigger circuit connected to the pair of the trigger electrodes, the trigger circuit configured to apply a voltage for starting lighting across the pair of the trigger electrodes.

A flash irradiation device includes: a light-emitting tube sealing a light-emitting gas inside; a pair of discharging electrodes being arranged distant from each other in the first direction; a reflecting member that is disposed on an opposite side of the light-emitting tube from the workpiece; a pair of trigger electrodes on an outer wall surface of the light-emitting tube or in a vicinity of the light-emitting tube, the pair of the trigger electrodes being arranged distant from each other in the first direction; a lighting circuit connected to the pair of the discharging electrodes, the lighting circuit being configured to supply electric power between the pair of the discharging electrodes; and a trigger circuit connected to the pair of the trigger electrodes, the trigger circuit configured to apply a voltage for starting lighting across the pair of the trigger electrodes.