The present disclosure relates to an X-ray source apparatus and a control method of the X-ray source apparatus in which a cathode electrode and a gate electrode are arranged in an array form to enable matrix control, and, thus, it is possible to irradiate X-rays at an optimum dose for each position on the subject. Therefore, it is possible to suppress the irradiation of more X-rays than are needed to the subject. Also, it is possible to obtain a high-resolution and high-quality X-ray image. As such, two-dimensional matrix control makes it easy to control the dose of X-rays and makes it possible to uniformly irradiate X-rays to the subject. Therefore, it is possible to manufacture a high-resolution surface X-ray source with less dependence on the size of the focus of electron beams.

A device and method for creating beam formed X-Ray radiation using radio frequency (RF) modulated field emission X-ray sources is described. A radio frequency RF source generates a RF control signal which is supplied to an array of phase delay elements to generate multiple individually controlled phase delayed RF signals. These are then directly provided to each of a plurality of field emission sources (via a matching circuit) to generate a plurality of RF modulated electron current, or beam, each at the same frequency and phase delay of the phase delayed RF signals. Each of the electron beams impacts a target anode to generate X-rays also at the same frequency and phase delay of the phase delayed RF signals. By controlling each of the phase delay elements a beamformed X-ray radiation pattern can be generated.

The present invention relates to large area field emission devices based on the incorporation of macroscopic, microscopic, and nanoscopic field enhancement features and a designed forced current sharing matrix layer to enable a stable high-current density long-life field emission device. The present invention pertains to a wide range of field emission sources and is not limited to a specific field emission technology. The invention is described as an X-ray electron source but can be applied to any application requiring a high current density electron source.

The present invention relates to a novel, non-rotating tomographic imaging system, including a multi-source x-ray imaging module which includes multiple x-ray sources within a vacuum manifold, each equipped with a non-thermionic cathode which can reduce image scan time (and hence, motion artifacts), or delivered radiation dose, through under-sampled acquisition sequences, and without adding additional sources. The non-thermionic nature of the cathode enables rapid on/off switching of x-rays without concern as to the thermal mass or the thermal time-constant of the cathode. The modules can be flexibly interconnected to each other to allow configuration as part of a distributed ring of sources, or in other x-ray imaging geometries. Modularity provides the present invention an advantage in making it easier to debug and repair a distributed-source imaging system, such as a computed tomographic (CT) system.

A system and method for generating X-ray radiation in a predefined spatial distribution on an anode. The system includes an anode, a first switching device, a second switching device, a control unit, and an emitter with multiple field effect emitter needles. At least one field effect emitter needle of the multiple field effect emitter needles includes a diameter of less than 1 m and silicon. A first group of the multiple field effect emitter needles may be activated or deactivated by the first switching device. A second group of the multiple field effect emitter needles may be activated or deactivated by the second switching device. The first group differs from the second group. The control unit is configured to actuate the first switching device and the second switching device.

The object of the present invention is to provide a cold cathode X-ray tube capable of being driven stably over a long period of time by preventing temporal reduction in anode current. A cold cathode X-ray tube 1 comprises an electron emission part 10 including an electron emission element using a cold cathode, an anode part 11 disposed opposite to the electron emission part 10, a target 12 disposed on a part of a surface of the anode part 11, a housing 15 in which the electron emission part 10, the anode part 11, and the target 12 are disposed, and a hydrogen generation part 14 that is made of a material that generates hydrogen when receiving collision of electrons and disposed on a portion other than the surface of the target 12 out of surfaces existing in the housing 15.

Provided is a field emission device. The field emission device includes a cathode electrode having a first surface and a second surface facing the first surface, the cathode electrode including grooves that are recessed from the first surface toward the second surface, the grooves extending in a first direction parallel to the first surface and emitter structures which are disposed within the grooves and each of which includes a core extending in the first direction and a conductive wire configured to surround the core. The grooves may be arranged in a second direction crossing the first direction, and the emitter structures may be disposed at vertical levels different from each other.

A MBFEX tube (1) for an x-ray device comprises, in a vacuum tube (20), an anode (30) designed as a cooling finger and securely arranged in the vacuum tube, and a plurality of securely arranged cathodes (40, 41, 42), wherein the vacuum tube (20) comprises a plurality of cathode feed lines (50) and no more than two high-voltage bushings (51, 52), in a high-voltage bushing (52) a coolant pipe (31) is passed through by an internal coolant inner pipe (32), the coolant pipe (31) and the coolant inner pipe (32) are provided for cooling the anode (30) with a liquid coolant, the cathodes (40, 41, 42) are provided for field emission of electrons and are arranged on the anode (30) for generating x-ray sources (Q).

A stationary in-vivo grating-enabled micro-CT (computed tomography) architecture (SIGMA) system includes CT scanner control circuitry and a number of imaging chains. Each imaging chain includes an x-ray source array, a phase grating, an analyzer grating and a detector array. Each imaging chain is stationary and each x-ray source array includes a plurality of x-ray source elements. Each imaging chain has a centerline, the centerlines of the number of imaging chains intersect at a center point and a first angle between the centerlines of a first adjacent pair of imaging chains equals a second angle between the centerlines of a second adjacent pair of imaging chains. A plurality of selected x-ray source elements of a first x-ray source array is configured to emit a plurality of x-ray beams in a multiplexing fashion.

An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.