Some embodiments include a system, comprising: a plurality of x-ray sources, each x-ray source including: an electron source configured to generate an electron beam; and a target configured to receive the electron beam and convert the electron beam into an x-ray beam; wherein: at first x-ray source of the x-ray sources is different from a second x-ray source of the x-ray sources; and the targets of the x-ray sources are part of a linear target.

A radiation tube attachment member includes: a common substrate that supports one end side of each of a plurality of radiation tubes and holds the plurality of radiation tubes in a state in which the plurality of radiation tubes are arranged; and a positioning portion that is provided in the common substrate and locates a focus of each of the plurality of radiation tubes at which radiation is emitted at a target position.

A system, comprising: a vacuum enclosure; an anode support structure penetrating the vacuum enclosure and including a plurality of first cooling passages; and an anode disposed within the vacuum enclosure, coupled to and supported by the anode support structure, and including: a target; and a plurality of second cooling passages; wherein: each of the second cooling passages is coupled to a corresponding first cooling passage; and the anode is coupled to the anode support structure on a side of the anode different from a side of the anode including the target and different from axial ends of the anode on a major axis of the anode

An electron emission structure according to embodiments of the inventive concept includes a cathode electrode and electron emission yarns each having a yarn shape and disposed in the cathode electrode. Here, the cathode electrode includes a plurality of first conductive panels spaced apart from each other in a first direction and at least one second conductive panel that crosses the first conductive panels in the first direction. Also, each of the first conductive panels includes at least one groove at an upper portion thereof. The second conductive panel is inserted to the groove of each of the first conductive panels. Each of the electron emission yarns is disposed between the first conductive panels. Each of the electron emission yarns contacts the second conductive panel. Each of the electron emission yarns is mechanically fixed and vertically aligned as well as arranged regularly by the second conductive panel and one pair of adjacent first conductive panels of the first conductive panels.

The present application relates to a deflection electrode assembly, an X-ray source, and an X-ray imaging system. The deflection electrode assembly includes: a first electrode plate, including a first connection portion and a plurality of first tooth portions, wherein the first electrode plate is formed as a comb shape; and a second electrode plate, including a second connection portion and a plurality of second tooth portions, wherein the second electrode plate is formed as a comb shape. The first electrode plate and the second electrode plate are not in contact with each other, and the plurality of first tooth portions and the plurality of second tooth portions are arranged at least partially in a staggered manner to form a plurality of electron beam passageways; each electron beam passageway is located between adjacent first and second tooth portions.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

An anode target comprises: a plurality of target structures, used for receiving an electron beam emitted by a cathode to generate a ray, the plurality of target structures being of three-dimensional structures having bevels; a copper cooling body, used for bearing the target structures and comprising an oxygen-free copper cooling body; a cooling oil tube, used for cooling the anode target; and a shielding layer, used for achieving a shielding effect and comprising a tungsten shielding layer. The anode target, the ray light source, the computed tomography scanning device, and the imaging method in the present application are able to enable all target spots on the anode target to be distributed on a straight line, imaging quality of a ray system is improved, and complexity of an imaging system is reduced.

Disclosed is a field emission-type tomosynthesis system including a vacuum body having a space therein; a plurality of sources provided inside the body, wherein each of the sources emits a plurality of electrons; and a plurality of anodes disposed inside the body to face the sources and responsible for emitting a plurality of X-rays, wherein each of the anodes faces a corresponding source among the sources, and the electrons collide with each of the anodes to generate X-rays, wherein the X-ray emission angle of each of the anodes is capable of being independently adjusted so as to focus the X-rays emitted toward an object located outside the body. With this configuration, a plurality of X-rays is focused on an object and is emitted to the object to obtain information, and the information is synthesized, thereby improving the reliability of information about the object.

A MBFEX tube (1) for an x-ray device comprises, in a vacuum tube (20), an anode (30) designed as a cooling finger and securely arranged in the vacuum tube, and a plurality of securely arranged cathodes (40, 41, 42), wherein the vacuum tube (20) comprises a plurality of cathode feed lines (50) and no more than two high-voltage bushings (51, 52), in a high-voltage bushing (52) a coolant pipe (31) is passed through by an internal coolant inner pipe (32), the coolant pipe (31) and the coolant inner pipe (32) are provided for cooling the anode (30) with a liquid coolant, the cathodes (40, 41, 42) are provided for field emission of electrons and are arranged on the anode (30) for generating x-ray sources (Q).

A portable x-ray imaging source (100) capable of motion-free x-ray tomosynthesis, wherein said source is suitable for dental and small body-part/small area imaging.