Embodiments of the present disclosure disclose a combined scanning X-ray generator, a composite inspection apparatus and an inspection method. The combined scanning X-ray generator includes: a housing; an anode arranged in the housing, the anode including a first end of the anode and a second end of the anode opposite the first end of the anode; a pencil beam radiation source arranged at the first end of the anode and configured to emit a pencil X-ray beam; and a fan beam radiation source arranged at the second end of the anode and configured to emit a fan X-ray beam; wherein the pencil beam radiation source and the fan beam radiation source are operated independently.

Controlling total emission current of an electron emitting construct in an x-ray emitting device by providing a cathode, providing multiple active areas each active area having a gated cone electron source, including multiple emitter tips arranged in an array, a gate electrode, and a gate interconnect lead connected to the gate electrode, providing an x-ray emitting construct comprising an anode, the anode being an x-ray target, situating the x-ray emitting construct facing the active areas face each other, selecting a set of active areas, and activating selected active areas by conductively connecting a voltage source to their associated the gate electrode interconnect lead.

A tomosynthesis system has an x-ray source with an addressable array of electron emitting sections on the cathode. The x-ray source moves rotationally about an imaging target, such as a breast. During the rotation, x-rays are emitting from the x-ray source while the x-ray source continues to move. During the emission of x-rays, different subsets of electron-emitting sections of the addressable array are activated to compensate for movement of the x-ray source. By activating the different subsets of electron-emitting sections, an effective focal spot of the x-ray position appears to retain the same shape, size, and position from the perspective of the imaging target, despite movement of the x-ray source itself.

A radiation emission device is provided. The radiation emission device may include an anode, a first cathode, a heating device and an enclosure. The first cathode may include a first filament that emit an electron beam striking the anode to generate radioactive rays for imaging. The heating device may be located outside of the first cathode and be configured to warm up the anode. The enclosure may be configured to enclosure the first cathode and the anode.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

An x-ray generating unit includes an x-ray tube that is substantially transparent to x-rays and that defines a vacuum therein. A cathode is disposed within the x-ray tube and defines a plurality of spaced apart cavities. An anode is spaced apart from the cathode and includes a material that emits x-rays when impacted by electrons. A plurality of filaments is each disposed in a different one of the cavities defined by the cathode and each is electrically coupled to the cathode. Each filament emits a focused electron beam directed to a different predetermined spot on the anode upon application of a predetermined voltage between the cathode and the anode, thereby causing the anode to generate x-rays.

An x-ray tube having at least one focusing cup and an anode. The x-ray tube may have a first filament positioned in a first location between the focusing cup and the anode, the first filament having a first size, and a second filament positioned in a second location between the focusing cup and anode, the second filament having a second size that is substantially the same as the first size. The x-ray tube may also include a switching mechanism configured to engage the second filament upon failure of the first filament.

An improved X-ray source is disclosed. The improved X-ray source has an enclosure, electron guns, a first set of address lines extending through the enclosure, a second set of address lines extending through the enclosure, and nodes defined by the intersection of the first and second set of address lines. Each of the electron guns is coupled to one of the nodes such that a state of each electron gun is uniquely controlled by modulating a state of one of the first set of address lines and one of the second set of address lines.

A multi-pixel x-ray source is provided. The x-ray source includes a plurality of transmission target assemblies. The transmission target assembly includes a tungsten target and a diamond substrate. The substrate includes a first transmission surface and a second transmission surface opposite first transmission surface. The substrate further includes a first side surface and a second side surface disposed between the first and second transmission surfaces. The target covers the first transmission surface of the substrate. The transmission target assembly further includes a base. The base surrounds the first and second side surfaces of substrate, exposing a collimator surface of the second transmission surface and the target. The transmission target assembly is configured to transmit x-ray generated by the target through the target and the substrate.

An electron emission structure according to embodiments of the inventive concept includes a cathode electrode and electron emission yarns each having a yarn shape and disposed in the cathode electrode. Here, the cathode electrode includes a plurality of first conductive panels spaced apart from each other in a first direction and at least one second conductive panel that crosses the first conductive panels in the first direction. Also, each of the first conductive panels includes at least one groove at an upper portion thereof. The second conductive panel is inserted to the groove of each of the first conductive panels. Each of the electron emission yarns is disposed between the first conductive panels. Each of the electron emission yarns contacts the second conductive panel. Each of the electron emission yarns is mechanically fixed and vertically aligned as well as arranged regularly by the second conductive panel and one pair of adjacent first conductive panels of the first conductive panels.