There is provided an anode stack for cooling and electrically insulating a high voltage anode of an X-ray device. The anode stack has at least a conductor member and a dielectric member, and the conductor member has a main body and a peripheral portion. The dielectric member overlies and couples with the main body of the conductor member at one surface. At an opposing surface of the main body of the conductor member, an end of the high voltage anode is coupled thereto in use. The peripheral portion of the conductor member has an annular region that surrounds at least a part of the dielectric member and which is spaced therefrom.

A multi-pixel x-ray source is provided. The x-ray source includes a plurality of transmission target assemblies. The transmission target assembly includes a tungsten target and a diamond substrate. The substrate includes a first transmission surface and a second transmission surface opposite first transmission surface. The substrate further includes a first side surface and a second side surface disposed between the first and second transmission surfaces. The target covers the first transmission surface of the substrate. The transmission target assembly further includes a base. The base surrounds the first and second side surfaces of substrate, exposing a collimator surface of the second transmission surface and the target. The transmission target assembly is configured to transmit x-ray generated by the target through the target and the substrate.

A transmission-target x-ray tube can include an x-ray window mounted on a window-housing. The window-housing can be made of a high density material (e.g. 12 g/cm.sup.3) with a high atomic number (e.g. 45), and can include an aperture with an increasing-inner-diameter region, with a smaller diameter closer to the electron-emitter and a larger diameter closer to the window-mount, for blocking x-rays and electrons. An example angle in the increasing-inner-diameter region is between 15 degrees and 35 degrees. The x-ray tube can further comprise a window-cap. The x-ray window can be sandwiched between the window-housing and the window-cap. The window-cap can be made of a high density material (e.g. 12 g/cm.sup.3) with a high atomic number (e.g. 45) for blocking x-rays in undesirable directions, and can include an aperture for allowing x-rays to transmit in desirable directions.

An X-ray tube includes: an envelope that is a case; a cathode assembly that emits electrons in the envelope; and an anode including a first member of which at least a portion extends to the outside of the envelope, a second member that is provided in a direction perpendicular to a central axis of the first member, comes into contact with the first member, and has a higher X-ray shielding performance than the first member, and a target that receives the electrons emitted from the cathode assembly and generates X-rays.

A composite target is provided and is interacted with an electron to generate an X-ray, and an energy of the electron can be changed by controlling a tube voltage at least. The composite target includes a target body and an interposing layer which is connected with the target body. The interposing layer moves a highest peak of an energy spectrum of the X-ray toward a high energy direction. The interposing layer may be a single metal or a metal mixture. Not only a low energy photon of the X-ray can be filtered by the interposing layer, but also a distribution of the low energy photon of the X-ray can be increased by increasing a thickness of the interposing layer. As the tube voltage is enhanced, an amount of a high energy photon of the X-ray generated is dramatically increased. An X-ray tube containing the above composite target is also provided.

A target structure for generation of x-ray radiation may include a heat sink; and a target element for electrons to strike, the target element being in the heat sink to cool the target element, wherein the heat sink includes a metal-diamond composite material.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

According to some aspects, a monochromatic x-ray source is provided. The monochromatic x-ray source comprises an electron source configured to generate electrons, a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target, and a secondary target comprising at least one layer of material capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation emitted by the primary target.

An x-ray target, a method of using the x-ray target, and a computer program product with instructions for carrying out a method of using the x-ray target. The x-ray target includes a substrate made from a soft x-ray producing material and a high aspect ratio structure made from a hard x-ray producing material. The hard x-ray producing material is embedded in the substrate, formed on the substrate, cantilevered out from the edge of the substrate, or any combination thereof. The high aspect ratio structure comprises a plurality of high aspect ratio structures arranged in one or more grids or arrays, and the high aspect ratio structures in one of the one or more grids or arrays are arranged to form a Hadamard matrix structure.

An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a low-pass filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.