According to some aspects, a carrier configured for use with a broadband x-ray source comprising an electron source and a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target is provided. The carrier comprising a housing configured to be removeably coupled to the broadband x-ray source and configured to accommodate a secondary target capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation, the housing comprising a transmissive portion configured to allow broadband x-ray radiation to be transmitted to the secondary target when present, and a blocking portion configured to absorb broadband x-ray radiation.

Provided is a field emission device. The field emission device includes a cathode electrode having a first surface and a second surface facing the first surface, the cathode electrode including grooves that are recessed from the first surface toward the second surface, the grooves extending in a first direction parallel to the first surface and emitter structures which are disposed within the grooves and each of which includes a core extending in the first direction and a conductive wire configured to surround the core. The grooves may be arranged in a second direction crossing the first direction, and the emitter structures may be disposed at vertical levels different from each other.

An x-ray source can include an x-ray tube, and a heat sink for removal of heat from the x-ray tube. The heat sink can be thermally coupled to the anode and can extend away from the anode along a heat sink longitudinal axis. The heat sink can have a base and a fin extending from the base. The base can have a greater thickness nearer the anode, and a reduced thickness along the heat sink longitudinal axis to a smaller thickness farther from the anode.

Embodiments provide a stationary X-ray source for a multisource X-ray imaging system for tomographic imaging. The stationary X-ray source includes an array of thermionic cathodes and, in most embodiments a rotating anode. The anode rotates about a rotation axis, however the anode is stationary in the horizontal or vertical dimensions (e.g. about axes perpendicular to the rotation axis). The elimination of mechanical motion improves the image quality by elimination of mechanical vibration and source motion; simplifies system design that reduces system size and cost; increases angular coverage with no increase in scan time; and results in short scan times to, in medical some medical imaging applications, reduce patient-motion-induced blurring.

An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.

A method and system are disclosed for producing an x-ray image of a sample using a lamella-shaped target to improve the usual tradeoff between imaging resolution and image acquisition time. A beam of electrons impacts the lamella-shaped target normal to the narrower dimension of the lamella which then determines the virtual source size along that axis. For low-energy x-ray generation, the small electron penetration depth parallel to the wider dimension of the lamella determines the virtual source size along that axis. Conductive cooling of the target is improved over post targets with the same imaging resolution. The lamella-shaped target is long enough to ensure that the electron beam does not impact the support structure which would degrade the imaging resolution. Target materials may be selected from the same metals used for bulk or post targets, including tungsten, molybdenum, titanium, scandium, vanadium, silver, or a refractory metal.

An X-ray tube according to the present invention comprises an anode and a cathode comprising an emission portion for emitting an electron beam. The emission portion is configured to irradiate a target surface of the anode with electrons to cause the anode to emit X-rays. A window is arranged at an end of the X-ray tube, to allow X-rays to exit the X-ray tube. The target surface of the anode is inclined at an oblique angle with respect to a longitudinal axis, wherein the longitudinal axis passes through the end of the X-ray tube.

A robust cold cathode uses an electron emitting construct design possibly for an x-ray emitter device. The electron beam emitted by the emitting construct is focused and accelerated by an electrical field towards an electron anode target. A shield is provided to prevent a cold cathode from being damaged by ion bombardment in high-voltage applications and a non-emitter zone may provide a robust ion bombardment zone. The system is further configured to provide an angled target anode or a stepped target anode to further reduce the ion bombardment damage.

Provided is a field emission device. The field emission device includes a cathode electrode having a first surface and a second surface facing the first surface, the cathode electrode including grooves that are recessed from the first surface toward the second surface, the grooves extending in a first direction parallel to the first surface and emitter structures which are disposed within the grooves and each of which includes a core extending in the first direction and a conductive wire configured to surround the core. The grooves may be arranged in a second direction crossing the first direction, and the emitter structures may be disposed at vertical levels different from each other.

An x-ray tube anode can include an electron hole extending from an electron entry at an exterior of the anode into a core of the anode, and an x-ray hole extending from an x-ray exit at the exterior of the anode into the core of the anode. The x-ray hole can intersect the electron hole at the core of the anode. In one embodiment, the electron hole and the x-ray hole can form a seamless bore from the electron entry to the x-ray exit. In another embodiment, the anode can be a single, integral, monolithic material with a single bore extending therethrough. In another embodiment, the core of the anode can include a target material located at a concave wall of the core of the anode.