An X-ray generation device includes: an electron gun that emits an electron beam; a target portion in which a plurality of elongated targets that generate an X-ray because of incidence of the electron beam are disposed parallel to each other; a housing that accommodates the electron gun and the target portion; and an X-ray emission window provided in the housing to emit the X-ray generated in the target portion, to an outside of the housing. The targets are disposed on the target portion to face the electron gun at a predetermined inclination angle with respect to an emission axis of the electron beam. The X-ray emission window is disposed at a position where the X-ray generated in a direction perpendicular to the target portion is transmittable through the X-ray emission window, to face the target portion at a predetermined inclination angle.

An x-ray tube source is disclosed that allows differential phase shift, attenuation, and x-ray scattering features of an object to be acquired in a single exposure. Such multiplexed x-ray tube source includes multiple x-ray spot origins controlled in such a way that each slightly separated spot is temporally modulated “ON and OFF” at differing frequencies. In an x-ray interferometer system, such x-ray tube source forms multiple illumination beams of a single angular view of an object's feature but each with different interference fringe locations. A composite image can be acquired with a high frame-rate digital detector as a component element in such x-ray interferometer system. Such composite image can be subsequently de-multipexed and separately presented according to each spot-source illumination beam. Such isolated images of an object's feature, each having different fringe locations, allows for post-acquisition “fringe-mapping” analysis of the feature's full interaction with x-rays, including refraction, scattering, and absorption.

Embodiments of the present disclosure disclose a combined scanning X-ray generator, a composite inspection apparatus and an inspection method. The combined scanning X-ray generator includes: a housing; an anode arranged in the housing, the anode including a first end of the anode and a second end of the anode opposite the first end of the anode; a pencil beam radiation source arranged at the first end of the anode and configured to emit a pencil X-ray beam; and a fan beam radiation source arranged at the second end of the anode and configured to emit a fan X-ray beam; wherein the pencil beam radiation source and the fan beam radiation source are operated independently.

A rotating X-ray anode for generating X-radiation has an annular main body made of carbon-based material, an annular focal track covering, which is arranged on a focal track side of the main body, and a metal connection component, which is arranged radially inside relative to the main body. A radially outer portion of the connection component is formed by a tubular metal adapter. The radial outside surface of the adapter is at least partly joined, face to face and integrally, to at least a portion of the radial inside surface of the main body. An integral joining zone between the main body and the adapter extends over at least 75 percent of the area of the radial inside surface of the main body.

The invention relates to an X-ray source (10) comprising at least one waveguide (30) for X-ray radiation, wherein the at least one waveguide (30) has a core (32) and a casing (40) surrounding the core (32), and wherein at least one part of the waveguide (30) is designed to emit X-ray radiation (50), if the part of the waveguide (30) is bombarded with electrons (52). The invention also relates to a system for generating X-ray radiation comprising an X-ray source of this type, and a method for generating X-ray radiation by means of an X-ray source of this type or a system of this type.

An X-ray source (100) comprise a microparticle source (200) configured to generate a particle stream (20) of spatially separated and moving, solid and/or liquid microparticles. The X-ray source (100) also comprises an electron source (300) configured to generate an electron beam (30) of electrons incident onto the particle stream (20) at an interaction region (1) to excite solid and/or liquid microparticles in the interaction region (1) to generate X-rays (10).

The invention includes a flat-panel-display (FPD) manufacturing machine which utilizes x-rays for electrostatic dissipation of a bottom side of a FPD when lifting the FPD off of a table during manufacture of the FPD. The invention also includes a method of electrostatic dissipation of a bottom side of an FPD.

The invention relates to a metal jet x-ray tube which is less affected by the problem of the power density at the point of impact of the electron beam on the anode component than conventional tubes. For this purpose the metal jet x-ray tube has a metal jet (6) as anode component (7), which metal jet is so thin that an electron beam (4) impinging on the metal jet (6) is only partially decelerated by the metal jet. Furthermore a blade cathode is provided as a cathode component (3), which blade cathode comprises a cathode blade (10) directed with a slight inclination downwards in the direction of the liquid metal jet (6) of the anode component (7).

X-ray target element is comprised of a planar wafer. The planar wafer element includes a target layer and a substrate layer. The target layer is comprised of an element having a relatively high atomic number and the substrate layer is comprised of diamond. The substrate layer is configured to support the target layer and facilitate transfer of thermal energy away from the target layer.

An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a “low-pass” filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.