According to some aspects, a monochromatic x-ray source is provided. The monochromatic x-ray source comprises an electron source configured to generate electrons, a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target, and a secondary target comprising at least one layer of material capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation emitted by the primary target.

According to some aspects, a monochromatic x-ray source is provided. The monochromatic x-ray source comprises an electron source configured to generate electrons, a primary target arranged to receive electrons from the electron source to produce broadband x-ray radiation in response to electrons impinging on the primary target, and a secondary target comprising at least one layer of material capable of producing monochromatic x-ray radiation in response to incident broadband x-ray radiation emitted by the primary target.

An energy converter unit and X-ray source system are presented. The energy converter unit comprises a multilayered crystal structure having a selected layers' arrangement comprising at least first and second of layers of at least first and second material compositions. The layers-arrangement is formed of a pattern of n1 layers of said first layer type and n2 layers of said second layer type generating a selected lattice periodicity of said layers. The lattice periodicity is selected such that said multilayered crystal structure responds to the charged particle beam of predetermined parameters by coherent emission of X-ray radiation having selected spectral content and emission direction.

An X-ray source (100) for generating X-ray radiation of first and second energy spectra is proposed, wherein the X-ray intensity imbalance between the first and second energy spectra is reduced as compared to conventional X-ray sources. The reduction of the X-ray intensity imbalance is achieved by configuring a smaller electron impact angle (141) onto the anode (102) when the higher tube voltage is applied as compared to when the lower tube voltage is applied.

A multi-pixel x-ray source is provided. The x-ray source includes a plurality of transmission target assemblies. The transmission target assembly includes a tungsten target and a diamond substrate. The substrate includes a first transmission surface and a second transmission surface opposite first transmission surface. The substrate further includes a first side surface and a second side surface disposed between the first and second transmission surfaces. The target covers the first transmission surface of the substrate. The transmission target assembly further includes a base. The base surrounds the first and second side surfaces of substrate, exposing a collimator surface of the second transmission surface and the target. The transmission target assembly is configured to transmit x-ray generated by the target through the target and the substrate.

An x-ray source can have increased x-ray flux and can simultaneously provide characteristic peaks and from multiple, different chemical elements. The target can include multiple layers of different chemical compositions. These layers can be distinguished by a higher atomic number, a higher energy K-alpha x-ray characteristic line, and a higher density in one layer compared to another layer. The layer that is lower in these characteristics can face the x-ray window. The layers can be formed by sputter deposition.

In one embodiment, an X-ray source includes a source target configured to generate X-rays when impacted by an electron beam. The source target includes one or more thermally conductive layers; and one or more X-ray generating layers interleaved with the thermally conductive layers, wherein at least one X-ray generating layer comprises regions of X-ray generating material separated by thermally conductive material within the respective X-ray generating layer.

A multi-pixel x-ray source is provided. The x-ray source includes a plurality of transmission target assemblies. The transmission target assembly includes a tungsten target and a diamond substrate. The substrate includes a first transmission surface and a second transmission surface opposite first transmission surface. The substrate further includes a first side surface and a second side surface disposed between the first and second transmission surfaces. The target covers the first transmission surface of the substrate. The transmission target assembly further includes a base. The base surrounds the first and second side surfaces of substrate, exposing a collimator surface of the second transmission surface and the target. The transmission target assembly is configured to transmit x-ray generated by the target through the target and the substrate.

An x-ray target, x-ray source, and x-ray system are provided. The x-ray target includes a thermally conductive substrate comprising a surface and at least one structure on or embedded in at least a portion of the surface. The at least one structure includes a thermally conductive first material in thermal communication with the substrate. The first material has a length along a first direction parallel to the portion of the surface in a range greater than 1 millimeter and a width along a second direction parallel to the portion of the surface and perpendicular to the first direction. The width is in a range of 0.2 millimeter to 3 millimeters. The at least one structure further includes at least one layer over the first material. The at least one layer includes at least one second material different from the first material. The at least one layer has a thickness in a range of 2 microns to 50 microns. The at least one second material is configured to generate x-rays upon irradiation by electrons.

The present disclosure relates to multi-layer X-ray sources having decreased hydrogen within the layer stack and/or tungsten carbide inter-layers between the primary layers of X-ray generating and thermally-conductive materials. The resulting multi-layer target structures allow increased X-ray production, which may facilitate faster scan times for inspection or examination procedures.