A target assembly for an x-ray emission apparatus is disclosed. The apparatus may comprise a vacuum chamber. The vacuum chamber may have at least one conductive wall. The apparatus may comprise an insulating element. The insulating element may project through the conductive wall. The apparatus may comprise a high voltage element. The high voltage element may extend along the insulating element. The high voltage element may extend from outside the chamber. The high voltage element may extend to an end portion of the insulating element furthest from the conductive wall. The apparatus may comprise an x-ray-generating target. The x-ray-generating target may be arranged at the end portion of the insulating element. The x-ray generating target may be electrically connected to the high voltage element. The apparatus may comprise a suppressive electrode. This suppressive electrode may be arranged at the end portion of the insulating element. This suppressive electrode may be configured to suppress acceleration towards the outer surface of the insulating element of electrons which are emitted from a junction between the outer surface of the insulating element and an inner surface of the conductive wall. An x-ray emission apparatus is also disclosed. The x-ray emission apparatus may comprise the target assembly. The apparatus may comprise an electron beam apparatus. The electron beam apparatus may be arranged to accelerate a beam of electrons towards an x-ray-generating target. The x-ray emission apparatus may thereby generate x-ray radiation.

An X-ray source (100) for generating X-ray radiation of first and second energy spectra is proposed, wherein the X-ray intensity imbalance between the first and second energy spectra is reduced as compared to conventional X-ray sources. The reduction of the X-ray intensity imbalance is achieved by configuring a smaller electron impact angle (141) onto the anode (102) when the higher tube voltage is applied as compared to when the lower tube voltage is applied.

A method of generating X-ray emission, and a system for generating X-ray emission are provided. The method comprises the steps of generating a beam of free electrons using an electron source; directing the beam of free electrons onto a crystalline material having a periodic material structure; generating X-ray emission as a result of the interaction between the free electrons and the crystalline material; and extracting a portion of the X-ray emission for providing an X-ray beam having a selected photon energy; wherein the selected photon energy is tunable by controlling, at least, a tilt angle of the crystalline material relative to the beam of free electrons.

In one embodiment, an X-ray source includes a source target configured to generate X-rays when impacted by an electron beam. The source target includes one or more thermally conductive layers; and one or more X-ray generating layers interleaved with the thermally conductive layers, wherein at least one X-ray generating layer comprises regions of X-ray generating material separated by thermally conductive material within the respective X-ray generating layer.

An x-ray illumination beam system includes an electron emitter and a target having one or more target microstructures. The one or more microstructures may be the same or different material, and may be embedded or placed atop a substrate formed of a heat-conducting material. The x-ray source may emit x-rays towards an optic system, which can include one or more optics that are matched to one or more target microstructures. The matching can be achieved by selecting optics with the geometric shape, size, and surface coating that collects as many x-rays as possible from the source and at an angle that satisfies the critical reflection angle of the x-ray energies of interest from the target. The x-ray illumination beam system allows for an x-ray source that generates x-rays having different spectra and can be used in a variety of applications.

An x-ray anode for generating x-radiation includes a carrier body and a first emission layer and at least one second emission layer, which generate x-radiation when they are impinged by electrons. The emission layers are separated by an intermediate layer on one side of the carrier body and are arranged a distance apart in a central direction of the x-ray anode.

The disclosed subject matter includes devices and methods relating to anode assemblies and/or X-ray assemblies. In some aspects, a method of forming an X-ray assembly may include providing an anode base formed of a first material and including a first end. The method may include depositing a second material different from the first material over a first surface of the anode base to form a coated portion of the anode base. The coated portion may be configured such that some backscattered electrons do not travel beyond the coated portion.

The present disclosure relates to multi-layer X-ray sources having decreased hydrogen within the layer stack and/or tungsten carbide inter-layers between the primary layers of X-ray generating and thermally-conductive materials. The resulting multi-layer target structures allow increased X-ray production, which may facilitate faster scan times for inspection or examination procedures.

Fabrication of a multi-layer X-ray source is disclosed using bulk structures to fabricate a multi-layer target structure. In one implementation, layers of X-ray generating material, such as tungsten, are interleaved with thermally conductive layers, such as diamond layers. To prevent delamination of the layers, various mechanical, chemical, and/or structural approaches may also be employed.

The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers.