Patent classifications
H01J2235/1026
Magnetic lift device for an x-ray tube
Technology is described for a magnetic lift device for an x-ray tube. In one example, an anode assembly includes an anode, a bearing assembly, a ferromagnetic shaft, and a lift electromagnet. The anode is configured to receive electrons emitted by a cathode. The bearing assembly is configured to stabilize the anode during a rotation of the anode. The ferromagnetic shaft is coupled to the anode and has an axis of rotation that is substantially collinear with an axis of rotation of the anode. The lift electromagnet is configured to apply a magnetic force to the ferromagnetic shaft in a radial direction.
Liquid metal rotating anode X-ray source for semiconductor metrology
Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.
X-ray arrangement with stator optimized for minimal focal spot movement
An X-ray arrangement includes a vacuum vessel, a rotating anode and a rotor of an electrical machine being non-rotatably interconnected rotatably mounted in the vacuum vessel, a stator being disposed in a region of the rotor, externally enclosing the vacuum vessel. The stator includes a laminated core which, viewed orthogonally to the axis of rotation, includes a yoke running around the axis of rotation and from which stator teeth extend onto the axis of rotation. A winding system is disposed in spaces between the stator teeth of the laminated stator core. The winding system includes windings, individual turns of the windings each being configured to respectively engage over a plurality of the stator teeth, and the stator being designed such that when identical phase voltages are applied to the individual phases of the winding system, the individual phases are each respectively configured to produce stray magnetic fields of identical magnitude.
ROTATING-ANODE BEARING AND A ROTATING ANODE FOR AN X-RAY TUBE AND A METHOD FOR MANUFACTURING A ROTATING-ANODE BEARING FOR AN X-RAY TUBE
The disclosure relates to a rotating-anode bearing for an X-ray tube comprising a rotor shaft extending along a longitudinal axis from a first axial end to a second axial end and supported to be rotatable about the longitudinal axis; wherein the rotor shaft has an anode holder in the area of the first axial end; and the anode holder comprises a flange which has a larger diameter than at least an adjacent section of the rotor shaft.
The rotating-anode bearing according to the disclosure wherein the rotor shaft together with the flange is made as an integrally forged part.
Magnetic assist assembly having heat dissipation
In one example, a lift assembly may exert a force on a rotatable anode of an X-ray tube. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and may be configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a first pole and a second pole oriented towards the lift shaft. Windings may be positioned around the first pole. The lift assembly may include a heat dissipating structure.
Magnetic assist bearing
In one example, a lift assembly may exert a force on a rotatable anode of an X-ray source. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a curved surface that contours around at least a portion of the shaft wall. A radius of curvature of the curved surface of the lift electromagnet may be greater than a radius of curvature of the lift shaft, and the spacing between the curved surface of the lift electromagnet and the shaft wall may be non-uniform.
MAGNETIC ASSIST BEARING
In one example, a lift assembly may exert a force on a rotatable anode of an X-ray source. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a curved surface that contours around at least a portion of the shaft wall. A radius of curvature of the curved surface of the lift electromagnet may be greater than a radius of curvature of the lift shaft, and the spacing between the curved surface of the lift electromagnet and the shaft wall may be non-uniform.
MAGNETIC ASSIST ASSEMBLY HAVING HEAT DISSIPATION
In one example, a lift assembly may exert a force on a rotatable anode of an X-ray tube. The lift assembly may include a lift shaft and a lift electromagnet. The lift shaft may be coupled to the anode and may be configured to rotate around an axis of rotation of the anode. The lift electromagnet may be configured to apply a magnetic force to the lift shaft in a radial direction. The lift electromagnet may include a first pole and a second pole oriented towards the lift shaft. Windings may be positioned around the first pole. The lift assembly may include a heat dissipating structure.
High-power X-ray sources and methods of operation
The present specification discloses a high power continuous X-ray source having a rotating target assembly that is cooled by circulation of a liquid material in contact with the target assembly, whereby the target assembly has a front surface being impinged by electrons and a mechanism for rotating the target assembly. The cooling liquid is always in contact with at least one surface of the target for dissipating the heat generated by the energy deposited by the stream of electrons, thereby lowering the temperature of the target to allow for continuous operation.
X-RAY TUBE DIAGNOSTIC SYSTEM
Some embodiments include a system, comprising: an enclosure configured to enclose a vacuum; a cathode disposed within the enclosure; an anode disposed within the enclosure configured to receive a beam of electrons from the cathode; a motor disposed within the enclosure and configured to rotate the anode in response to a drive input; and a circuit electrically connected to the drive input, and configured to generate a phase signal based on a voltage of the drive input and a current of the drive input, the phase signal indicating a phase difference between the voltage of the drive input and the current of the drive input.