Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.

Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.

A radiographic image diagnostic apparatus according to embodiments includes an X-ray tube, a holding member, and coil control circuitry. The X-ray tube includes: a cathode that emits electrons; coils that generate electromagnetic force; and an anode that rotates about a rotation axis in response to the electromagnetic force and to generate an X-ray by receiving the electrons. The holding member holds the X-ray tube so that the X-ray tube is movable. The coil control circuitry controls a current to be supplied to the coils based on at least one of a position of the X-ray tube, a direction of the X-ray tube, or a velocity of the X-ray tube.

An X-ray arrangement includes a vacuum vessel, a rotating anode and a rotor of an electrical machine being non-rotatably interconnected rotatably mounted in the vacuum vessel, a stator being disposed in a region of the rotor, externally enclosing the vacuum vessel. The stator includes a laminated core which, viewed orthogonally to the axis of rotation, includes a yoke running around the axis of rotation and from which stator teeth extend onto the axis of rotation. A winding system is disposed in spaces between the stator teeth of the laminated stator core. The winding system includes windings, individual turns of the windings each being configured to respectively engage over a plurality of the stator teeth, and the stator being designed such that when identical phase voltages are applied to the individual phases of the winding system, the individual phases are each respectively configured to produce stray magnetic fields of identical magnitude.

A system may include a motor that has a rotor and a stator. The system may include one or more sensors that measure a voltage signal of a winding of the stator. The system may include a processor that executes computer-executable instructions which, when executed, cause the processor to receive, from the one or more sensors, the voltage signal that includes an induced voltage signal associated with the winding of the stator, to determine a time constant associated with the induced voltage signal based on a decay pattern of the induced voltage signal, to determine a temperature of a rotor based on the time constant, and to adjust one or more operations of the motor based on the temperature.

An X-ray generating device includes an electron beam generator configured to generate an electron beam; a target configured to generate X-rays in response to the electron beam incident on the target; an eccentric rotator configured to be cocentrically rotated to rotate the target while changing a position of the target; and a driver configured to rotationally drive the eccentric rotator.

Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.

The present specification discloses a high power continuous X-ray source having a rotating target assembly that is cooled by circulation of a liquid material in contact with the target assembly, whereby the target assembly has a front surface being impinged by electrons and a mechanism for rotating the target assembly. The cooling liquid is always in contact with at least one surface of the target for dissipating the heat generated by the energy deposited by the stream of electrons, thereby lowering the temperature of the target to allow for continuous operation.