Patent classifications
H01J2237/2002
VACUUM COMPATIBLE FLUID SAMPLER
A fluid sampler includes: a sample cell that includes: a substrate comprising: a first port; a second port in fluid communication with the first port; a viewing reservoir in fluid communication with the first port and the second port and that receives the fluid from the first port and communicates the fluid to the second port, the viewing reservoir including: a first view membrane; a second view membrane; and a pillar interposed between the first view membrane and second view membrane, the pillar separating the first view membrane from the second view membrane at a substantially constant separation distance such that a volume of the viewing reservoir is substantially constant and invariable with respect to a temperature and invariable with respect to a pressure to which the sample cell is subjected.
ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMPLE HOLDER
An analysis system, an analysis method and a sample holder make it possible to analyse a battery via a particle beam system, for example to record images of the battery via the particle beam system, while the battery is arranged in a vacuum chamber of the particle beam system and is manipulated according to a multiplicity of different parameter value sets in the vacuum chamber. By way of example, the battery is kept at a predefined temperature, a predefined pressure is exerted on the battery, and the battery is electrically charged and discharged according to a loading scheme and at the same time images of the battery are recorded via the particle beam system.
Systems And Methods For Measuring Magnetic Fields Produced Within An Electron Microscope
In some embodiments, a system for measuring magnetic fields produced within a microscope comprising an electromagnetic lens includes a sensor support element configured to be mounted to a distal end of an elongated support member that is configured to be inserted into the microscope, and a magnetic field sensor supported by the sensor support element, the magnetic field sensor being configured to sense magnetic fields at a position within the electron microscope at which specimens are imaged during operation of the microscope.
Multi-Stage/Multi-Chamber Electron-Beam Inspection System
Techniques for yield management in semiconductor inspection systems are described. According to one aspect of the present invention, columns of sensing mechanism are configured with different functions, weights and performances to inspect a sample to significantly reduce the time that would be otherwise needed when all the columns were equally applied.
Thin-ice grid assembly for cryo-electron microscopy
A grid assembly for cryo-electron microscopy may be fabricated using standard nanofabrication processes. The grid assembly may comprise two support members, each support member comprising a silicon substrate coated with an electron-transparent silicon nitride layer. These two support members are positioned together with the silicon nitride layers facing each other with a rigid spacer layer disposed therebetween. The rigid spacer layer defines one or more chambers in which a biological sample may be provided and fast frozen with a high degree of control of the ice thickness.
Transmission electron microscope provided with at least one ballistic material jet source
A transmission electron microscope is provided, including a column defining an object chamber, at least one ballistic material jet source outside the object chamber, and tightly attached to the column, facing an opening, referred to as a port, provided on the column; having at least one jet source arranged outside the column and including a collimator of the material jet towards a predetermined direction, passing through the port and leading into the object chamber so that a portion of the material jet exits the source in the object chamber.
Preparation of sample for charged-particle microscopy
A system and method for preparing a sample for study in a charged-particle microscope is disclosed. A sample holder comprises substantially parallel opposing faces connected by apertures spanned by a perforated membrane. Blotting material is placed against the outer membrane surface, and liquid films may then be deposited onto the inner membrane surface within each aperture where each aperture can contain a unique sample. Liquids from each sample flow through the perforations in the membrane to be absorbed by the blotting material. After completion of deposition of liquid samples, the sample holder is raised off the blotting material, leaving aqueous samples within the perforations of the membrane. The sample holder may then be immersed in a vitrifying bath of liquid oxygen to form a cryo-sample for microscopic imaging and analysis.
Device for monitoring environmental states of a microscope sample with an electron microscope sample holder
An apparatus and a method for measuring and monitoring the properties of a fluid, for example, pressure, temperature, and chemical properties, within a sample holder for an electron microscope. The apparatus includes at least one fiber optic sensor used for measuring temperature and/or pressure and/or pH positioned in proximity of the sample.
OPTICAL VACUUM CRYO-STAGE FOR CORRELATIVE LIGHT AND ELECTRON MICROSCOPY
An optical vacuum cooling cryostage for correlative light and electron microscopy comprises a vacuum chamber, an anti-contamination system adapter interface, an electron microscope specimen holder adapter interface, an upper optical window, a lower optical window, a vacuum pumping system adapter interface and a vacuum valve, wherein the anti-contamination system adapter interface is arranged in one end of the vacuum chamber, the electron microscope specimen holder adapter interface is arranged in the other end of the vacuum chamber, the upper optical window is arranged on the upper wall of the vacuum chamber, the lower optical window is arranged on the lower wall of the vacuum chamber and opposite to the upper optical window.
CHARGED PARTICLE BEAM APPARATUS, ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
An electron microscope includes: a sample holder; a first optical system irradiating and scanning the sample; an electron detection unit detecting secondary electrons discharged from the sample; a first vacuum chamber which holds the sample holder, the first optical system, and the electron detection unit in a vacuum atmosphere; a display unit displaying a microscopic image of the sample; and a control unit which controls the sample holder and the operation of the first optical system. The electron microscope includes a second vacuum chamber different from the first vacuum chamber, and a second optical system in the second vacuum chamber and is different from the first optical system. The second optical system and the control unit are capable of mutual communication, and the second vacuum chamber has a state changing means which changes the state of the sample.