A method of observing a defect in a sample includes securing the sample on a stage inside a chamber of a dual beam system, probing a first probe pad of the sample with a probe tip, electrically connecting the probe tip to a ground line to discharge the sample, probing a second probe pad of the sample with the probe tip, electrically connecting the probe tip to a voltage line or a signal line to send stimulation into the sample to identify a region having the defect, milling the sample by a first beam of the dual beam system to free a lamella containing the region from the sample while the sample is secured on the stage, lifting the lamella away from the sample by the probe tip, securing the lamella on a grid, and observing the region by a second beam of the dual beam system.

A probe tip landing method for a measurement system is provided. The probe tip landing method includes performing a first descending operation to lower a probe toward a sample by a first descending distance; performing a second descending operation to lower the probe toward the sample; and performing an inspection operation during the second descending operation. The inspection operation includes an imaging operation, scanning the sample to obtain a first image including a probe tip of the probe; and a determining operation, checking the first image to determine that in the first image, whether a region connected with the probe tip becomes bright. The probe tip landing method further includes in response to the region connected with the probe tip in the first image becoming bright, determining that the probe has contacted a surface of the sample and the probe has landed successfully.

The invention relates to a device for holding a sample for use with an optical appliance, a system, a method for manufacturing a device and a method for holding a sample in an optical appliance. A device (10) for holding a sample for use with an optical appliance, in particular an electron microscope, comprises a sample area (12) for arranging a sample, a light source (14) for illuminating the sample arranged in the sample area (12), a holding section (16) which enables the device (10) to be held by a sample holder of the optical appliance, and a contact section (18). The contact section (18) has at least two electrical contacts (20) for establishing an electrical connection with the sample holder to power the light source (14).