A microreactor for use in a microscope, comprising a first and second cove layer (13), which cover layers are both at least partly transparent to an electron beam (14) of an electron microscope, and extend next to each other at a mutual distance from each other and between which a chamber (15) is enclosed, wherein an inlet (4) and an outlet (5) are provided for feeding fluid through the chamber and wherein heating means (8) are provided for heating the chamber and/or elements present therein.

Systems and methods are provided for positioning a wafer in relation to a datum structure. In one example, a system comprises a camera arrangement including at least two cameras, each of the at least two cameras including a field of view when positioned in the camera arrangement, each field of view including a peripheral edge of the wafer and a peripheral edge of the datum structure. A processor receives positional data from each of the at least two cameras and determines, in relation to each field of view, a gap size between the respective peripheral edges of the wafer and the datum location included in the respective field of view. A controller adjusts a position of the wafer relative to the datum structure based on the determined respective gap sizes.

A method of observing a defect in a sample includes securing the sample on a stage inside a chamber of a dual beam system, probing a first probe pad of the sample with a probe tip, electrically connecting the probe tip to a ground line to discharge the sample, probing a second probe pad of the sample with the probe tip, electrically connecting the probe tip to a voltage line or a signal line to send stimulation into the sample to identify a region having the defect, milling the sample by a first beam of the dual beam system to free a lamella containing the region from the sample while the sample is secured on the stage, lifting the lamella away from the sample by the probe tip, securing the lamella on a grid, and observing the region by a second beam of the dual beam system.

Systems and methods are provided for positioning a wafer in relation to a datum structure. In one example, a system comprises a camera arrangement including at least two cameras, each of the at least two cameras including a field of view when positioned in the camera arrangement, each field of view including a peripheral edge of the wafer and a peripheral edge of the datum structure. A processor receives positional data from each of the at least two cameras and determines, in relation to each field of view, a gap size between the respective peripheral edges of the wafer and the datum location included in the respective field of view. A controller adjusts a position of the wafer relative to the datum structure based on the determined respective gap sizes.

The invention relates to a device for holding a sample for use with an optical appliance, a system, a method for manufacturing a device and a method for holding a sample in an optical appliance. A device (10) for holding a sample for use with an optical appliance, in particular an electron microscope, comprises a sample area (12) for arranging a sample, a light source (14) for illuminating the sample arranged in the sample area (12), a holding section (16) which enables the device (10) to be held by a sample holder of the optical appliance, and a contact section (18). The contact section (18) has at least two electrical contacts (20) for establishing an electrical connection with the sample holder to power the light source (14).

A method of time-resolved charged particle microscopy comprises the step of providing a sample for charged particle microscopy, wherein said sample comprises a first particle and a second particle, and wherein said sample comprises a barrier material between said first particle and said second particle. The method further comprises the step of liquifying at least a part of the barrier material for enabling an interaction between the first particle and the second particle. Finally, the resulting interaction between the first particle and the second particle can be observed in a charged particle microscope.