Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/20
Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
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H01J2237/208
Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
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