Provided is a winding type aberration corrector that generates a multipole field, in which mechanical positional accuracy required to dispose the current wires can be mitigated. For this purpose, a multipole lens constituting the aberration corrector includes a magnetic core, and a plurality of current wires, in which a plurality of grooves are provided in an inner wall of the magnetic core, centers of the plurality of grooves being disposed axisymmetrically relative to a central axis of the magnetic core, and main wire portions of the plurality of current wires are respectively disposed in the plurality of grooves of the magnetic core.

In order to provide an aberration corrector with a wide aberration correction range, easy control, highly accurate aberration correction, and a low cost, an aberration corrector, passing an electron beam through a central axis 201, includes a first current line group (101 to 112) which is arranged parallel to an optical axis at a position separated by R1 from the central axis, and excites a first multipole field, and a second current line group (21 to 32) which is arranged parallel to the optical axis at a position separated by R2 from the central axis, and independently excites a second multipole field having an order and intensity different from those of the first multipole field.

A system combination includes a particle beam system and a light-optical system. The particle beam system can be an individual particle beam system or a multiple particle beam system. A light entry mechanism can provided at a branching site of a beam tube arrangement within a beam switch. A light beam of the light-optical system can enter into the beam tube arrangement through the light entry mechanism such that the light beam impinges, in substantially collinear fashion with particle radiation, on an object to be inspected. Parts of the light-optical beam path and parts of the particle-optical beam path can extend parallel to one another or overlap with one another. This arrangement can allow light of the light-optical system to be incident in perpendicular fashion on an object to be inspected, optionally without impairing the particle-optical resolution of the particle beam system.

A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.

The present invention is in the field of a cryo transfer system for use in microscopy, and a microscope comprising said system. The present invention is in the field of microscopy, specifically in the field of electron and focused ion beam microscopy (EM and FIB), and in particular Transmission Electron Microscopy (TEM). However its application is extendable in principle to any field of microscopy, especially wherein a specimen (or sample) is cooled or needs cooling.

In order to control a charge amount on a sample surface to a desired value before calculating a frame integration image, the invention provides a charged particle beam device including: a charged particle beam source configured to irradiate a sample with a charged particle beam; a deflector configured to scan an observation region of the sample with the charged particle beam; a detector configured to detect a charged particle emitted from the sample due to scanning with the charged particle beam; an image generation unit configured to generate a frame image of the observation region based on an observation signal output from the detector; and a scanning suspension time setting unit configured to set a scanning suspension time, which is a time during which scanning of the observation region with the charged particle beam is suspended after a frame image is generated, in which the image generation unit calculates a frame integration image by integrating frame images generated with the scanning suspension time interposed.

Correctors for correcting axial aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure include a first primary multipole that generates a first primary multipole field when a first excitation is applied to the first primary multipole, and a second primary multipole that generates a second primary multipole field when a second excitation is applied to the second primary multipole. The first primary multipole is not imaged onto the second primary multipole such that a combination fourth-order aberration is created. The correctors further include a secondary multipole for correcting the fourth-order aberration and the sixth-order aberration. Such correctors may further include a tertiary multipole for correcting an eighth-order aberration.

A portable vacuum antioxidant bag installed in an electron microscope to prevent oxidation of a sample includes a magnet fixing part formed by attaching a flexible magnet to an opening of the portable vacuum antioxidant bag, a gas inlet and a gas outlet formed on two sides of the portable vacuum antioxidant bag, the gas inlet through which gas is injected into the portable vacuum antioxidant bag, and the gas outlet through which air exits the portable vacuum antioxidant bag by the injected gas, and a pair of gloves formed in a shape of hands toward an inside of the portable vacuum antioxidant bag, wherein the portable vacuum antioxidant bag is tightly contact with the electron microscope due to the magnetic force by the magnet fixing part.

A charged particle beam apparatus includes a sample stage on which a sample is mounted, a control device that controls to drive the sample stage, a linear scale that detects a position of the sample stage, laser position detection means for detecting the position of the sample stage, an optical microscope that observes the sample mounted on the sample stage, and a barrel that irradiates the sample mounted on the sample stage with an electron beam, and generates a secondary electron. Image data of a first correction sample mounted on the sample stage is acquired by the optical microscope, and position data of the sample stage is detected by the laser position detection means. The sample stage is positioned with respect to the barrel based on the image data acquired by the optical microscope and the position data of the sample stage detected by the laser position detection means.

A method and system for analyzing a specimen in a microscope are disclosed. The method comprises: acquiring a series of compound image frames using a first detector and a second detector, different from the first detector, wherein acquiring a compound image frame comprises: causing a charged particle beam to impinge upon a plurality of locations within a region of a specimen, the region corresponding to a configured field of view of the microscope, the microscope being configured with a set of microscope conditions, monitoring, in accordance with the configured microscope conditions, a first set of resulting particles generated within the specimen at the plurality of locations using the first detector so as to obtain a first image frame, monitoring, in accordance with the configured microscope conditions, a second set of resulting particles generated within the specimen at the plurality of locations using the second detector, so as to obtain a second image frame, wherein each image frame comprises a plurality of pixels corresponding to, and derived from the monitored particles generated at, the plurality of locations within the region, for each pixel of the second image frame, if the configured microscope conditions are the same as those for a stored second image frame of an immediately preceding acquired compound frame in the series, and if the respective pixel corresponds to a location within the region to which a stored pixel comprised by said stored second image frame corresponds, combining said stored pixel with the pixel so as to increase the signal-to-noise ratio for the pixel, and combining the first image frame and second image frame so as to produce the compound image frame, such that the compound image frame provides data derived from, for each of the plurality of pixels, the particles generated at the corresponding location within the region and monitored by each of the first detector and second detector; and displaying the series of compound image frames in real-time on a visual display.