Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

A low pressure mercury gas discharge ultraviolet lamp with a tubular elongate body with two opposing ends, a first end and a second end, which contains a gas filling, and with at least two electric connectors at each end, which are electrically connected to at least one filament being provided at each end. A discharge length is defined between the filaments, in which at least two filaments are provided at each end of the discharge length. The filaments can be individually supplied with electric energy. The at least two filaments at the first end are of different size and different mass, and the at least two filaments at the second end are of different size and different mass.

A low pressure mercury gas discharge ultraviolet lamp with a tubular elongate body with two opposing ends, a first end and a second end, which contains a gas filling, and with at least two electric connectors at each end, which are electrically connected to at least one filament being provided at each end. A discharge length is defined between the filaments, in which at least two filaments are provided at each end of the discharge length. The filaments can be individually supplied with electric energy. The at least two filaments at the first end are of different size and different mass, and the at least two filaments at the second end are of different size and different mass.

A microelectromechanical light emitter component comprises an emitter layer structure of the microelectromechanical light emitter component and an inductive structure of the microelectromechanical light emitter component. The inductive structure of the microelectromechanical light emitter component is configured to generate current in the emitter layer structure by electromagnetic induction, such that the emitter layer structure emits light. The emitter layer structure is electrically insulated from the inductive structure.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

A conductive structure comprising: a plurality of conductive devices; a first conductive spring sheet, comprising a first connecting point; and a second conductive spring sheet, comprising a second connecting point. Each of the conductive devices comprises a first conductive end and a second conductive end. The second conductive end is connected to the second connecting point, and the first conductive end is connected to the first connecting point corresponding to the second connecting point to which the second conductive end is connected.

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

A low pressure mercury gas discharge ultraviolet lamp with a tubular elongate body with two opposing ends, a first end and a second end, which contains a gas filling, and with at least two electric connectors at each end, which are electrically connected to at least one filament being provided at each end. A discharge length is defined between the filaments, in which at least two filaments are provided at each end of the discharge length. The filaments can be individually supplied with electric energy. The at least two filaments at the first end are of different size and different mass, and the at least two filaments at the second end are of different size and different mass.