Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

A lightbulb comprising a bulb portion (10) in which is housed an illuminating component configured to selectively emit visible light, the lightbulb having a cap portion (16) configured to mount the lightbulb in a light fitting or lamp holder, the cap portion incorporating a adaptor element configured to selectively alter the configuration of the cap portion between a screw fitting and a bayonet fitting.

A socket assembly for receiving a lamp with a pinch seal and a connecting pin led out therethrough is provided having an outer housing part with an essentially cylindrical cavity which is accessible from outside via a slotted opening extending in a longitudinal direction of the outer housing part, an inner part mounted for rotation about a rotation axis (R) inside the outer housing part and including a free space which is configured for receiving the pinch seal and the connecting pin and is accessible from outside, and two opposed leaf springs for fixation of the pinch seal in the free space.

A socket assembly for receiving a lamp with a pinch seal and a connecting pin led out therethrough is provided having an outer housing part with an essentially cylindrical cavity which is accessible from outside via a slotted opening extending in a longitudinal direction of the outer housing part, an inner part mounted for rotation about a rotation axis (R) inside the outer housing part and including a free space which is configured for receiving the pinch seal and the connecting pin and is accessible from outside, and two opposed leaf springs for fixation of the pinch seal in the free space.

A socket assembly for receiving a lamp with a pinch seal and a connecting pin led out therethrough is provided having an outer housing part with an essentially cylindrical cavity which is accessible from outside via a slotted opening extending in a longitudinal direction of the outer housing part, an inner part mounted for rotation about a rotation axis (R) inside the outer housing part and including a free space which is configured for receiving the pinch seal and the connecting pin and is accessible from outside, and two opposed leaf springs for fixation of the pinch seal in the free space.

A socket assembly for receiving a lamp with a pinch seal and a connecting pin led out therethrough is provided having an outer housing part with an essentially cylindrical cavity which is accessible from outside via a slotted opening extending in a longitudinal direction of the outer housing part, an inner part mounted for rotation about a rotation axis (R) inside the outer housing part and including a free space which is configured for receiving the pinch seal and the connecting pin and is accessible from outside, and two opposed leaf springs for fixation of the pinch seal in the free space.

Disclosed herein is a filament bulb with uniform luminance, which decreases the dark area at the top portion of the filament bulb and increases the luminance efficiency, and includes the following components, a bulb casing, a filament unit, a reflector ring, a driver, and a bulb cap. The bulb casing is connected with the bulb cap, and together, the two define an interior space. The driver is disposed in the bulb cap, whereas the filament unit is disposed within the interior space and the bottom of the filament unit is electrically connected with the driver. The reflector ring surrounds the exterior of the bottom of the filament unit, and is configured to reflect the light emitted from the filament unit to decrease the dark area at the top portion of the filament bulb.

To provide a socket for a halogen lamp, which allows easy attachment and removal operations, as well as enables stable contact between a lamp terminal and an external electrode terminal when the lamp is attached. The socket includes a first holder part having a first hole, a second holder part having a second hole, and a spring member accommodated at a position between the first hole and the second hole and having a third hole. The first hole, second hole, and third hole have a shape extending in a direction that is different from a direction in which the terminal is passed through. The terminal is turned after being passed through the holes, whereby the terminal moves inside the first hole, second hole, and third hole, and is fixed when the terminal reaches an outer edge portion of the third hole of the spring member.

A lightbulb comprising a bulb portion (10) in which is housed an illuminating component configured to selectively emit visible light, the lightbulb having a cap portion (16) configured to mount the lightbulb in a light fitting or lamp holder, the cap portion incorporating a adaptor element configured to selectively alter the configuration of the cap portion between a screw fitting and a bayonet fitting.