Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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22/00
Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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H01L22/10
Measuring as part of the manufacturing process
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H01L22/14
for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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