Patent classifications
H01L24/76
Exposure apparatus, exposure method, and method of manufacturing article
The present invention provides an exposure apparatus which exposes a substrate, comprising a measurement unit configured to measure a height of the substrate at each of a plurality of measurement points, and a control unit configured to control the height of the substrate based on measurement results obtained by the measurement unit, and control an operation to arrange a shot region of the substrate in a first position and expose the shot region, wherein the shot region includes a plurality of partial regions, and the control unit causes the measurement unit to measure the height of the substrate by arranging the shot region in a second position different from the first position so that the number of measurement points arranged in the plurality of partial regions is larger than that when arranging the shot region in the first position.
Bare die integration with printed components on flexible substrate
A hybrid electronic assembly includes a substrate having conductive circuit tracings, and includes at least one opening defined within length and width dimensions of the substrate. An electronic circuit component which has conductive circuit tracings, and is located within the at least one opening of the substrate. An alignment area where a first surface of the substrate and a first surface of the electronic circuit component are aligned in a substantially planar flat relationship with the electronic circuit component. A non-alignment area where a second surface of the substrate and a second surface of the electronic circuit component are in a non-aligned relationship. A bonding material formed on at least a portion of the second surface of the substrate and on at least a portion of the electronic circuit component and where conductive traces are formed between the first surface of the substrate and the first surface of the electronic circuit component, providing electrical connections between the substrate and the electronic circuit component.
IMAGE SENSOR PACKAGE AND IMAGING APPARATUS
An image sensor package according to an embodiment of the present technology includes: a solid-state image sensor; a transparent substrate; and a package substrate. The solid-state image sensor has a light-receiving surface including a light-reception unit and a first terminal unit, and a rear surface opposite to the light-receiving surface. The transparent substrate faces the light-receiving surface. The package substrate includes a frame portion, a second terminal unit, and a supporting body. The frame portion has a joint surface to be joined to the transparent substrate and includes a housing portion housing the solid-state image sensor. The second terminal unit is to be wire-bonded to the first terminal unit, the second terminal unit being provided in the frame portion. The supporting body is provided in a peripheral portion of the light-receiving surface or at a center portion of the rear surface and partially supports the light-receiving surface or the rear surface.
Bare die integration with printed components on flexible substrate without laser cut
Provided is a manufacturing process for electronic circuit components such as bare dies, and packaged integrated chips, among other configurations, to form electronic assemblies. The surface of the electronic circuit component carries electronic elements such as conductive traces and/or other configurations including contact pads. A method for forming an electronic assembly includes providing a tacky layer. Then an electronic circuit component is provided having a first side and a second side, where the first side carries the electronic elements. The first side of the electronic circuit component is positioned into contact with the tacky layer. A bonding material is then deposited to a portion of the adhesive layer that is not covered by the first side of the electronic circuit component, to a depth which is sufficient to cover at least a portion of the electronic circuit component. The bonding material is then fixed or cured into a fixed or cured bonding material, and the tacky layer is removed. By these operations, the electronic circuit component is held in a secure attachment by the fixed or cured bonding material, and circuit connections may be made.
METHOD AND FIXTURE FOR CHIP ATTACHMENT TO PHYSICAL OBJECTS
Development of smart objects with electronic functions requires integration of printed components with IC chips or dies. Conventional chip or die bonding including wire bonding, flip chip bonding, and soldering may not be applicable to chip or die attachment on low temperature plastic surfaces used in physical objects. Printing conductive connection traces requires a smooth interface between contact pads of a chip and the surface of the physical object. In order to address this issue of chip/die attachment to a physical object, this disclosure provides embodiments to construct a fixture on a chip or die for attachment and electrical connection onto a physical object by printing operations and/or ACF bonding methods.
Wiring substrate and method for manufacturing the same
A wiring substrate includes insulating layers including a first insulating layer and an outermost insulating layer such that the first insulating layer is positioned at one end of the insulating layers in a lamination direction and that the outermost insulating layer is positioned at the opposite end of the insulating layers in the lamination direction and includes a reinforcing material; conductive layers laminated on the insulating layers such that the conductive layers include an outermost conductive layer formed on the outermost insulating layer and including pads, and a semiconductor element accommodated in an accommodating portion of the first insulating layer. The insulating layers are formed such that the insulating layers do not contain a reinforcing material other than the outermost insulating layer.
Method for manufacturing semiconductor package structure and semiconductor manufacturing apparatus
A method for manufacturing a semiconductor package structure and a semiconductor manufacturing apparatus are provided. The method includes: (a) providing a package body disposed on a chuck, wherein the package body includes at least one semiconductor element encapsulated in an encapsulant; and (b) sucking the package body through the chuck to create a plurality of negative pressures on a bottom surface of the package body sequentially from an inner portion to an outer portion of the package body.
Ink leveling device and method of manufacturing display device using the same
An ink leveling device includes a stage on which a target substrate is disposed, base frames disposed at sides of the stage, moving members coupled to the base frames and movable upward and downward, and at least one plate coupled to the moving members and disposed to press the target substrate. Light-emitting element ink is disposed on the target substrate.
Massively parallel transfer of microLED devices
MicroLED devices can be transferred in large numbers to form microLED displays using processes such as pick-and-place, thermal adhesion transfer, or fluidic transfer. A blanket solder layer can be applied to connect the bond pads of the microLED devices to the terminal pads of a support substrate. After heating, the solder layer can connect the bond pads with the terminal pads in vicinity of each other. The heated solder layer can correct misalignments of the microLED devices due to the transfer process.
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING ARTICLE
The present invention provides an exposure apparatus which exposes a substrate, comprising a measurement unit configured to measure a height of the substrate at each of a plurality of measurement points, and a control unit configured to control the height of the substrate based on measurement results obtained by the measurement unit, and control an operation to arrange a shot region of the substrate in a first position and expose the shot region, wherein the shot region includes a plurality of partial regions, and the control unit causes the measurement unit to measure the height of the substrate by arranging the shot region in a second position different from the first position so that the number of measurement points arranged in the plurality of partial regions is larger than that when arranging the shot region in the first position.