H01L29/402

POWER SEMICONDUCTOR DEVICE WITH THICK TOP-METAL-DESIGN AND METHOD FOR MANUFACTURING SUCH POWER SEMICONDUCTOR DEVICE

The present application contemplates a method for manufacturing a power semiconductor device. The method comprises: providing a wafer of a first conductivity type, the wafer having a first main side and a second main side opposite to the first main side, and the wafer including an active cell area, which extends from the first main side to the second main side, in a central part of the wafer and a termination area surrounding the active cell area in an orthogonal projection onto a plane parallel to the first main side; forming a metallization layer on the first main side to electrically contact the wafer in the active cell area, wherein the surface of the metallization layer, which faces away from the wafer, defines a first plane parallel to the first main side; forming an isolation layer on the first main side in the termination area, wherein the surface of the isolation layer facing away from the wafer defines a second plane parallel to the first main side; after the step of forming the metallization layer and after the step of forming the isolation layer, mounting the wafer with its first main side to a flat surface of a chuck; and thereafter thinning the wafer from its second main side by grinding while pressing the second main side of the wafer onto a grinding wheel by applying a pressure between the chuck and the grinding wheel, wherein the first plane is further away from the wafer than a third plane, which is parallel to the second plane and arranged at a distance of 1 μm from the second plane in a direction towards the wafer.

LATERAL INSULATED GATE BIPOLAR TRANSISTOR
20180012980 · 2018-01-11 ·

A lateral insulated gate bipolar transistor, comprising: a substrate (100), having a first conductivity type; an insulating layer (200), formed on the substrate (100); an epitaxial layer (300), having a second conductivity type and formed on the insulating layer (200); a field oxide layer (400), formed on the epitaxial layer (300); a first well (500), having the first conductivity type; a plurality of gate trench structures (600); second source doped regions (720), having the second conductivity type; first source doped regions (710), having the first conductivity type; a second well (800), having the second conductivity type; a first drain doped region (910), having the first conductivity type and formed on a surface layer of the second well (800); gate lead-out ends (10); a source lead-out end (20); a drain lead-out end (30).

NITRIDE SEMICONDUCTOR DEVICE
20180012960 · 2018-01-11 ·

A nitride semiconductor device includes a substrate; a nitride semiconductor layered structure disposed on the substrate and having a channel region; a first electrode and a second electrode both disposed on the nitride semiconductor layered structure; a first p-type nitride semiconductor layer disposed between the first electrode and the second electrode; and a first gate electrode disposed on the first p-type nitride semiconductor layer. The nitride semiconductor layered structure includes a first recess. The first p-type nitride semiconductor layer is at least partially disposed inside the first recess, and is separated from a side surface of the first recess.

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
20180012984 · 2018-01-11 ·

A semiconductor device includes a first trench gate electrode and a second trench gate electrode which are electrically connected to a gate electrode, and a third trench gate electrode and a fourth trench gate electrode which are electrically connected to an emitter electrode. A plurality of p.sup.+ type semiconductor regions are formed in a part of a semiconductor layer between the first trench gate electrode and the second trench gate electrode. The plurality of p.sup.+ type semiconductor regions are arranged to be spaced apart from each other along an extending direction of the first trench gate electrode when seen in a plan view.

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
20180012992 · 2018-01-11 ·

A semiconductor device and a forming method thereof, the semiconductor device includes a first and a second wells, a source region, a drain region, two gate structures and at least one doping region. The first well with a first conductive type is disposed in a substrate, and the source region is disposed in the first well. The second well with a second conductive type is disposed adjacent to the first well in a substrate, and the drain region is disposed in the second well. Two gate structures are disposed on the substrate between the source region and the drain region. At least one doping region with the first conductive type is disposed in the second well between the two gate structures.

Laterally diffused metal oxide semiconductor device and method for manufacturing the same

A laterally diffused metal oxide semiconductor device can include: a base layer; a source region and a drain region located in the base layer; a first dielectric layer located on a top surface of the base layer and adjacent to the source region; a voltage withstanding layer located on the top surface of the base layer and located between the first dielectric layer and the drain region; a first conductor at least partially located on the first dielectric layer; a second conductor at least partially located on the voltage withstanding layer; and a source electrode electrically connected to the source region, where the first and second conductors are spatially isolated, and the source electrode at least covers a space between the first and second conductors.

SEMICONDUCTOR DEVICE
20230238312 · 2023-07-27 ·

The semiconductor device includes a semiconductor element, a first lead, and a second lead. The semiconductor element has an element obverse surface and an element reverse surface spaced apart from each other in a thickness direction. The semiconductor element includes an electron transit layer disposed between the element obverse surface and the element reverse surface and formed of a nitride semiconductor, a first electrode disposed on the element obverse surface, and a second electrode disposed on the element reverse surface and electrically connected to the first electrode. The semiconductor element is mounted on the first lead, and the second electrode is joined to the first lead. The second lead is electrically connected to the first electrode. The semiconductor element is a transistor. The second lead is spaced apart from the first lead and is configured such that a main current to be subjected to switching flows therethrough.

SEMICONDUCTOR DEVICE WITH TRENCH ISOLATION STRUCTURES IN A TRANSITION REGION AND METHOD OF MANUFACTURING

A semiconductor device includes a semiconductor layer, an electronic element and laterally separated trench isolation structures. The semiconductor layer includes an element region having an inner region, an outer region on opposite sides of the inner region, and a transition region that laterally separates the inner region and the outer region. The electronic element includes a first doped region formed in the inner region and a second doped region formed in the outer region. The trench isolation structures are formed at least in the transition region. Each trench isolation structure extends from a first surface of the semiconductor layer into the semiconductor layer.

ENHANCED CAPACITOR FOR INTEGRATION WITH METAL-OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR

A capacitor is provided for integration with a MOSFET device(s) formed on the same substrate. The capacitor comprises a first plate including a doped semiconductor layer of a first conductivity type, an insulating layer formed on an upper surface of the doped semiconductor layer, and a second plate including a polysilicon layer formed on an upper surface of the insulating layer. An inversion layer is formed in the doped semiconductor layer, beneath the insulating layer and proximate the upper surface of the doped semiconductor layer, as a function of an applied voltage between the first and second plates of the capacitor. At least one doped region of a second conductivity type, opposite the first conductivity type, is formed in the doped semiconductor layer adjacent to a drain and/or source region of the first conductivity type formed in the MOSFET device. The doped region is electrically connected to the inversion layer.

SEMICONDUCOTR DEVICE
20230238434 · 2023-07-27 · ·

A semiconductor device according to one or more embodiments may include: on a semiconductor substrate, a high voltage circuit region; a transistor element region; an isolation region that elementally isolates the transistor element region from the high voltage circuit region; and a capacitively coupled field plate including plural lines of conductors, wherein the capacitively coupled field plate is provided to extend circumferentially along an outer circumferential portion of the high voltage circuit region and across the transistor element region, in a plan view of the semiconductor device, and one or more dividing sections divides at least one of the plural lines of conductors in the capacitively coupled field plate to make the at least one line discontinuous.