A semiconductor device is provided, the semiconductor device including: a first electrode; an N-type semiconductor layer arranged on the first electrode; a P-type semiconductor layer arranged on the N-type semiconductor layer; a first insulating layer surrounding and partitioning a first region in plan view, arranged on the P-type semiconductor layer; a second electrode arranged on the P-type semiconductor layer; a second insulating layer arranged on the first insulating layer surrounding and partitioning the first region in plan view on the second electrode; a metal plating layer arranged on the second electrode; a solder layer arranged on the metal plating layer; and a clip arranged on the solder layer, and the first region is a region where the clip is joined with the metal plating layer.

A semiconductor package including a first interposer comprising a first substrate, first optical components over the first substrate, a first dielectric layer over the first optical components, and first conductive connectors embedded in the first dielectric layer, a photonic package bonded to a first side of the first interposer, where a first bond between the first interposer and the photonic package includes a dielectric-to-dielectric bond between a second dielectric layer on the photonic package and the first dielectric layer, and a second bond between the first interposer and the photonic package includes a metal-to-metal bond between a second conductive connector on the photonic package and a first one of the first conductive connectors and a first die bonded to the first side of the first interposer.

Die structures and methods of forming the same are described. In an embodiment, a device includes: a lower integrated circuit die; a first upper integrated circuit die face-to-face bonded to the lower integrated circuit die, the first upper integrated circuit die including a first semiconductor substrate and a first through-substrate via; a gap-fill dielectric around the first upper integrated circuit die, a top surface of the gap-fill dielectric being substantially coplanar with a top surface of the first semiconductor substrate and with a top surface of the first through-substrate via; and an interconnect structure including a first dielectric layer and first conductive vias, the first dielectric layer disposed on the top surface of the gap-fill dielectric and the top surface of the first semiconductor substrate, the first conductive vias extending through the first dielectric layer to contact the top surface of the first through-substrate via.