A coaxial RF switch comprising a pair of coaxial conductors and a confinement flexure affixing to a conductor reed, wherein said confinement flexure having at least one fixed end such that the conductor reed can move freely and consistently to make and break the connections to the coaxial conductors.

An apparatus includes first and second electronically tunable transmission lines configured to transmit or receive a signal pair and provide a selected phase delay difference to the signal pair corresponding to a selected polarization, a first attenuation element connected to the first electronically tunable transmission line and a second attenuation element connected to the second electronically tunable transmission line. The first and second attenuation elements may each be configured to selectively attenuate signals carried on the electronically tunable transmission line to which they are connected according to a selected attenuation setting of a plurality of selectable attenuation settings provided by one or more attenuation control signals and thereby provide a selected attenuation to the signal pair that corresponds to the selected polarization. A corresponding method is also disclosed herein.

A method and system for providing a switchable waveguide are provided. According to some aspects, a switched waveguide has a waveguide structure having a reflector located within the waveguide structure. The switched waveguide also includes a radio frequency (RF) switch configured to connect and disconnect the reflector to the waveguide structure.

Disclosed is radio frequency switch circuitry that includes a switch branch having a first branch terminal coupled to a first signal port and a second branch terminal coupled to a second signal port, and a branch control terminal, wherein the switch branch has both an on-state and an off-state to control passage of a radio frequency signal between the first signal port and the second signal port in response to a control signal applied to the control terminal. The radio frequency switch circuitry further includes an isolation inductor coupled between the first branch terminal and the second branch terminal such that the isolation inductor is in parallel with the switch branch, wherein the isolation inductor has a given inductance that provides resonance with a total off-state capacitance of the switch branch in the off-state at a center frequency of the radio frequency signal.

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

A micro-electro-mechanical system (MEMS) transfer switch is disclosed. The transfer switch comprises a single-pole, N-throw switch section having N selectable switches. Each selectable switch of the N selectable switches has an input, a control terminal and an output. An electrically conductive line is coupled to each of the selectable switches of the N selectable switches. The transfer switch includes a single-pole, M-throw switch section having M selectable switches coupled to the conductive line, each selectable switch of the M selectable switches having an output, a control terminal and an input. The single-pole, N-throw switch section and the single-pole, M-throw switch section are packaged in a single micro-electro-mechanical system (MEMS) die. The N and M are numbers between two and eight and the N selectable switches and the M selectable switches are different switches.

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

Power combiner/divider includes a transmission line (TL) resonator having an inner conductor, an outer conductor that surrounds the inner conductor, and a cavity between the inner conductor and the outer conductor. The inner conductor and the outer conductor are electrically connected at a proximal end of the TL resonator. The power combiner/divider also includes coupling elements extending through respective openings of the outer conductor and into the cavity. The power combiner/divider also includes a capacitive element connected to at least one of the inner conductor or the outer conductor. The capacitive element capacitively couples the inner conductor and the outer conductor at a distal end of the TL resonator.

A mechanical, M-to-N, reciprocating millimeter waveguide switch is provided, where M and N are integers. A mechanical, one-to-four, reciprocating millimeter waveguide switch is also provided, together with a method for switching millimeter waves from one input to one of four outputs is also provided.