The present invention provides a stator including magnets having six poles; a rotor disposed inside the stator and including thirteen slots; a coil wound around the slot; a rotary shaft coupled to the rotor; a commutator coupled to the rotary shaft and connected to the coil; and a plurality of brushes disposed to be pressed against the commutator and located to have an angular interval of 63 to 66 in the circumferential direction of the rotary shaft, thereby providing advantageous effects in that a current ripple is minimized and a torque is maximized.

High reliability and long life are achieved by being sliding-less. The switch according to the present invention includes: first terminal and a second terminal that are adjacently attached to a stator; a movable shaft movable in a first direction and a second direction, a plurality of movers attached to the movable shaft; and a movable segment that is connected to two of the plurality of movers and biases the two movers in a direction in which they are away from each other. The switch is capable of switching among: a first mode in which when the movers move in the first direction, the mover is pushed by the stator to deform the movable segment so as to protrude toward the terminal, and the movable segment comes into contact with the first terminal; an intermediate mode in which deformation of the movable segment by the movers is released, and the movable segment is in contact with neither the first terminal nor the second terminal; and a second mode in which when the movers move in the second direction, the mover is pushed by the stator to deform the movable segment so as to protrude toward the terminal, and the movable segment comes into contact with the second terminal.

Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

Embodiments of a slip ring for use in a rotatable substrate support are provided herein. In some embodiments a slip ring includes a main body having a top wall, a bottom wall, and a sidewall extending between the top and bottom walls, wherein the top wall, bottom wall, and sidewall define an inner volume within the main body, wherein a central opening is formed through the top wall; a plurality of annular containers disposed within the inner volume and coaxially with the main body, wherein the plurality of annular containers are vertically spaced apart from one another, and wherein each of the plurality of annular containers contains a first volume of an electrically conductive liquid; an upper cylindrical body rotatably disposed in the central opening; a lower cylindrical body fixedly coupled to the lower wall of the main body.

A contact ring for an electroprocessor has redundant contact fingers, i.e., more contact fingers than needed for contacting a very narrow edge exclusion zone on a substrate such as a semiconductor wafer. The contact fingers have slightly different lengths so that they extend to different radial positions. By providing redundant contact fingers, and by slightly varying the lengths of the contact fingers, a sufficient number of contact fingers make contact with the electrically conductive surface in the edge exclusion zone to provide good electroplating results.

Camera heads and associated rotating contact assemblies are disclosed. In one embodiment a slip-ring assembly includes a rotating contact assembly including slip rings having a cylindrical ring assembly and a flexible or bendable brush assembly. Brush elements may flexed to remain in contact with corresponding ring assembly electrical contacts. Bush contacts may be coated or have attached contact assemblies to increase hardness and oxide resistance with materials such as palladium nickel, rhodium, or hard gold, though a variety of other materials may be used as a suitable coating.

Camera heads and associated rotating contact assemblies are disclosed. In one embodiment a slip-ring assembly includes a rotating contact assembly including slip rings having a cylindrical ring assembly and a flexible or bendable brush assembly. Brush elements may flexed to remain in contact with corresponding ring assembly electrical contacts. Bush contacts may be coated or have attached contact assemblies to increase hardness and oxide resistance with materials such as palladium nickel, rhodium, or hard gold, though a variety of other materials may be used as a suitable coating.

A slip ring apparatus including a ring assembly having a conductive ring with a conductive ring engagement surface, a contact assembly having a contact element with a contact element engagement surface for engaging with the conductive ring engagement surface, and a surface discontinuity provided in at least one of the conductive ring engagement surface and the contact element engagement surface. An apparatus including the slip ring apparatus, wherein the apparatus includes a housing having an interior and a shaft rotatably extending through the interior of the housing. A method for reducing the potential of a hydroplaning effect in a slip ring apparatus, including providing a surface discontinuity in at least one of a conductive ring engagement surface and a contact element engagement surface.

A slip ring apparatus including a ring assembly having a conductive ring with a conductive ring engagement surface, a contact assembly having a contact element with a contact element engagement surface for engaging with the conductive ring engagement surface, and a surface discontinuity provided in at least one of the conductive ring engagement surface and the contact element engagement surface. An apparatus including the slip ring apparatus, wherein the apparatus includes a housing having an interior and a shaft rotatably extending through the interior of the housing. A method for reducing the potential of a hydroplaning effect in a slip ring apparatus, including providing a surface discontinuity in at least one of a conductive ring engagement surface and a contact element engagement surface.

A bearing isolator and explosion-proof current diverting device may be configured to dissipate an electrical charge from a rotating piece of equipment to ground, such as from a motor shaft to a motor housing. One aspect of an explosion-proof current diverter ring may include a stator that may be mounted to the equipment housing and a rotor that may be mounted to a shaft. The rotor may rotate with the shaft. A conductive assembly may be positioned in a radial bore formed in the stator such that the conductive assembly contacts the rotor to conduct electricity from the shaft to the housing through the explosion-proof current diverting device. The explosion-proof current diverting device may be configured to define a flame path to achieve various explosion-proof certifications.