Various aspects of the present disclosure are directed to a transport device in the form of a planar motor. In one example embodiment, the transport device includes at least one transport segment that forms a transport plane, at least one first transport unit that moves at least two-dimensionally on the transport plane, and a plurality of drive coils arranged on the at least one segment. The transport device further includes at least one first and at least one second magnet group arranged on the at least one first transport unit. Each magnet group has a plurality of drive magnets with a different direction of magnetization arranged one behind the other in a specific arrangement direction with a specific pole pitch. The transport device further includes a first coil group having a first plurality of drive coils, and a second coil group having a second plurality of drive coils.

A magnetic linear actuator includes a stator and a rotor. The stator includes a first helical array of magnets. The rotor is disposed within the stator and includes a second helical array of magnets. The second helical array of magnets includes a first helical band of magnets and a second helical band of magnets. A first of the magnets of the first helical band coupled to at least one other of the magnets of the first helical band. A first of the magnets of the second helical band coupled to at least one other of the magnets of the second helical band.

A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.

A substrate transfer device, includes: a first planar motor installed in a first chamber and having an array of coils; a second planar motor installed in a second chamber connected to the first chamber and having an array of coils; a pair of transfer units configured to move on at least one of the first planar motor and the second planar motor and configured to transfer a substrate; and a controller configured to control supply of electric current to the coils of the first planar motor and the second planar motor.

A VCM (voice coil motor) is disclosed, the VCM including: a rotor including a cylindrical bobbin for accommodating a lens and protruded at a bottom end with a boss, and a coil block arranged at a periphery of the bobbin; a stator including a magnet facing the coil block and a yoke fixing the magnet; and an elastic member including a first elastic member formed with a through hole coupled to the boss of the bobbin and a second elastic member coupled to an upper end facing the bottom end of the bobbin; wherein the boss is formed with a disengagement prevention unit inhibiting the first elastic member from being disengaged from the boss, and the first elastic member is formed with a coupling unit contacting a joint where the disengagement prevention unit and the coupling unit meet.

A VCM (voice coil motor) is disclosed, the VCM including: a rotor including a cylindrical bobbin for accommodating a lens and protruded at a bottom end with a boss, and a coil block arranged at a periphery of the bobbin; a stator including a magnet facing the coil block and a yoke fixing the magnet; and an elastic member including a first elastic member formed with a through hole coupled to the boss of the bobbin and a second elastic member coupled to an upper end facing the bottom end of the bobbin; wherein the boss is formed with a disengagement prevention unit inhibiting the first elastic member from being disengaged from the boss, and the first elastic member is formed with a coupling unit contacting a joint where the disengagement prevention unit and the coupling unit meet.

An actuator comprises a coil, a first cooling plate and a second cooling plate. The cooling plates are configured to cool the coil. The first and second cooling plates are arranged at opposite sides of the coil to be in thermal contact with the coil. The coil comprises a first coil part and a second coil part, the first coil part facing the first cooling plate and the second coil part facing the second cooling plate, the first and second coil parts being separated by a spacing there between. The first cooling plate, the first coil part, the spacing, the second coil part and the second cooling plate form a stacked structure whereby the coil parts are arranged between the cooling plates and the spacing is arranged between the coil parts. The actuator further comprises a filling element arranged in the spacing. The filling element to push the first coil part towards the first cooling plate and to push the second coil part towards the second cooling plate.

There is provided a method for contactless determination of the position of a driven moving portion (4) of an electric motor (2) by means of a plurality of magnetic field sensors (8), wherein the moving portion is movably arranged with respect to a stator (6) and has a plurality of permanent magnets (40) which generate a moving-portion magnetic field having a plurality of periodically spaced apart maxima, and wherein the plurality of magnetic field sensors are arranged along a movement path (43) of the moving portion. The method comprises the following steps: by means of the plurality of magnetic field sensors, determining a plurality of measured values (70) for a momentary magnetic field that is generated by the plurality of permanent magnets and dependent on the position of the moving portion, determining a specific spectral signal component (74) from the plurality of measured values (70), the specific spectral signal component having the spatial frequency corresponding to the distance between adjacent like maxima of the moving-portion magnetic field, and determining the position of the driven moving portion by means of the specific spectral signal component.

Drive generator having a helical magnetic array. Additionally, a coupling portion is coupled to the drive generator and configured to be coupled to a vehicle. A drive member is configured to be at least partially located within the at least one drive generator, whereby the drive member is magnetically coupled to the at least one drive body. Furthermore, a prime mover is coupled to the drive member and configured to rotate the drive member, thereby imparting motion, when a portion of the drive member is located within the at least one drive generator, of the at least one drive generator relative to the drive member.

A linear head module includes a plurality of linear units each having an output member, and a housing. The linear unit has a mover and a stator. The stator has an output-side bearing holder and a counter-output-side bearing holder. The housing has: a main body portion integrally including an output-side surface portion, a counter-output-side surface portion, and a coupling portion that couples the output-side surface portion and the counter-output-side surface portion; a flange facing the output-side surface portion; and a bracket facing the counter-output-side surface portion.