A layered actuation structure includes a first platform pair and a second platform pair. Each of the first platform pair and the second platform pair include an actuation platform and a mounting platform, forming an actuation cavity of each of the first platform pair and the second platform pair. One or more connecting ledges of each platform pair couple at least one of the actuation platform and the mounting platform of each platform pair to at least one of an actuation arm and a support arm, respectively. A collective stiffness of the one or more connecting ledges of the first platform pair is different than a collective stiffness of the one or more connecting ledges of the second platform pair. The layered actuation structure also includes one or more artificial muscles disposed in the actuation cavity of the first platform pair and the second platform pair.

A dielectric elastomer drive system A1 includes: a dielectric elastomer drive unit 1 provided with a dielectric elastomer layer 11 and a pair of electrode layers 12 flanking the dielectric elastomer layer 11; a power supply unit 5 configured to apply voltage to the dielectric elastomer drive unit 1; and a charge removal unit 2 configured to remove the charge stored in the dielectric elastomer drive unit 1. The configuration contributes to improving responsiveness.

Provided is a novel actuator that can easily achieve movement with multiple degrees of freedom. An actuator includes a flexible electrode, a first base electrode disposed to face the flexible electrode on the Y-axis and provided with a first insulating layer on an opposite face, a second base electrode disposed to face the flexible electrode on the X-axis and provided with a second insulating layer on an opposite face, and a first output member and a second output member adapted to be displaced according to deformation of the flexible electrode. A first space is formed between the first insulating layer and the flexible electrode, in which the flexible electrode deforms toward the first insulating layer by an applied voltage. A second space is formed between the second insulating layer and the flexible electrode, in which the flexible electrode deforms toward the second insulating layer by an applied voltage.

An example device includes a nanovoided polymer element, a first electrode, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. In some examples, the nanovoided polymer element may include anisotropic voids. In some examples, anisotropic voids may be elongated along one or more directions. In some examples, the anisotropic voids are configured so that a polymer wall thickness between neighboring voids is generally uniform. Example devices may include a spatially addressable electroactive device, such as an actuator or a sensor, and/or may include an optical element. A nanovoided polymer layer may include one or more polymer components, such as an electroactive polymer.

An electrostatic actuator has a first polymeric layer formed with an arch, a first electrode of metal deposited upon the first polymeric layer; a second polymeric layer formed flat; a second electrode of metal deposited upon the second polymeric layer; and a dielectric disposed on the second electrode. The second polymeric layer is mechanically coupled to the first polymeric layer at a first and second end of the arch. In an embodiment, the actuator has a pair of legs attached to the arch of the first polymeric layer to form a crawler unit. In another embodiment a steerable robot has a first crawling unit with its second polymeric layer mechanically coupled to the second polymeric layer of a second crawling unit.

A micromechanical arm array is provided. The micromechanical arm array comprises: a plurality of micromechanical arms spaced from each other in a first horizontal direction and extending in a second horizontal direction, wherein each micromechanical arm comprises a protrusion at a top of each micromechanical arm and protruding upwardly in a vertical direction; a plurality of protection films, each protection film encapsulating one of the plurality of micromechanical arms; and a metal connection structure extending in the first horizontal direction. The metal connection structure comprises: a plurality of joint portions, each joint portion corresponding to and surrounding the protrusion of one of the plurality of micromechanical arms; and a plurality of connection portions extending in the first horizontal direction and connecting two neighboring joint portions.

A method may include measuring an electrical parameter of an electromagnetic load having a moving mass during the absence of a driving signal actively driving the electromagnetic load, measuring a mechanical parameter of mechanical motion of a host device comprising the electromagnetic load, correlating a relationship between the mechanical parameter and the electrical parameter, and calibrating the electromagnetic load across a plurality of mechanical motion conditions based on the relationship.

In some embodiments, a device, such as a transducer, includes a polymer element disposed between electrodes, and a control circuit configured to apply electrical potentials having the same polarity to the electrodes. A separation distance between the electrodes may be increased by an electrostatic repulsion between the electrodes. Various other devices, systems, methods, and computer-readable media are also disclosed.

A variable stiffening device that includes a flexible envelope having a fluid chamber, a dielectric fluid housed within the fluid chamber, and an electrode stack that includes a plurality of electrodes and one or more abrasive strips. The electrode stack is housed within the fluid chamber and is configured to receive voltage. In addition, the one or more abrasive strips are each positioned between adjacent electrodes, such that when voltage is applied to the electrode stack thereby electrostatically drawing adjacent electrodes together, the one or more abrasive strips generate frictional engagement between adjacent electrodes to actuate the variable stiffening device from a relaxed state to a rigid state.

Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.