An integrated circuit includes an electrode voltage controller, a micro-electromechanical system (MEMS) structure, and a bias voltage generator. The MEMS structure has a first electrode, a conductive plate, and a reflective layer on the conductive plate. The first electrode is coupled to the electrode voltage controller, and the conductive plate is configured to move vertically with respect to the first electrode responsive to a voltage generated by the electrode voltage controller and applied to the first electrode. The bias voltage generator is coupled to the conductive plate. The bias voltage generator has an input configured to receive a bias control signal. The bias voltage generator is configured to apply a non-zero bias voltage to the conductive plate responsive to the bias control signal.

Illustrative embodiments provide an electrostatic actuator and methods of making and operating an electrostatic actuator. The electrostatic actuator comprises a framework and a plurality of electrodes. The framework comprises walls defining a plurality of cells forming an array of cells. The plurality of electrodes comprise an electrode in each cell in the plurality of cells. A gap separates the electrode in each cell from the walls of the cell. The framework is configured to contract in response to an electrical signal applied between the framework and the plurality of electrodes.

Devices, methods, and systems for electrostatic machines which can act as both an electric motor, converting electrical energy to mechanical energy, and an electric generator, converting mechanical energy to electrical energy, are described. In some embodiments, a spring positioned between two oppositely charged plates may be used as an electric motor and/or electric generator.

A method of manufacturing an actuator includes a first electrode layer forming step, a dielectric elastomer layer forming step, and a second electrode layer forming step, and obtains the actuator in which dielectric elastomer layers and electrode layers have been concentrically laminated. In the first electrode layer forming step, an electrode material is provided to an outer circumferential surface of a shaft section to form the electrode layer. In the dielectric elastomer layer forming step, a sheet-like or paste-like dielectric elastomer material is provided to an outer circumferential surface of the electrode layer to form the dielectric elastomer layer. In the second electrode layer forming step, the electrode material is provided to an outer circumferential surface of the dielectric elastomer layer to form the electrode layer.

The presently disclosed subject matter relates to electromechanical systems and devices, and more particularly to electromechanical systems for implementing reflective devices for displays, sensors, and authentication solutions. In some embodiments a reflective device includes a thin film transistor layer and a plurality of reflective elements positioned approximately parallel to the thin film transistor layer. The plurality of reflective elements is electrically coupled with the thin film transistor layer. Each reflective element is configured for controlling a reflectance parameter of the reflective element based on a first voltage applied to the reflective element by the thin film transistor. In other embodiments, a reflective element includes a transparent substrate and a plurality of polymer-air pair layers positioned approximately parallel position to the transparent substrate. The plurality of polymer-air pair layers are configured to vary a reflectance parameter based on a force applied to the plurality of polymer-air pair layers.

A display device includes a scanned projector for projecting a beam of light, and a diffraction grating for dispersing the light at a plurality of angles into a waveguide, wherein at least a portion of the diffraction grating includes a nanovoided polymer. Manipulation of the nanovoid topology, such as through capacitive actuation, can be used to reversibly control the effective refractive index of the nanovoided polymer and hence the grating efficiency. The switchable grating can be used to control the amount of diffraction of an incident beam of light through the grating thereby decreasing optical loss. Various other methods, systems, apparatuses, and materials are also disclosed.

An actuator drive apparatus according to a first aspect includes a first member, a second member that faces the first member via a gap, a gap sensor that detects a dimension of the gap, a first actuator that changes the dimension of the gap through input of a first voltage signal, and a second actuator that changes the dimension of the gap through input of a second voltage signal, in which the first voltage signal is a voltage signal that becomes a constant bias voltage after a lapse of a predetermined time, and includes an overshoot signal larger than the bias voltage before the lapse of the predetermined time, and the second voltage signal is a voltage signal that is feedback-controlled so that a detection value detected by the gap sensor approaches a target value.

In some examples, a device includes a nanovoided polymer element, a planarization layer disposed on a surface of the nanovoided polymer element, a first electrode disposed on the planarization layer, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. The planarization layer may be located between the nanovoided polymer element and the first electrode.

A driver for a circuit with a capacitive load is configured for coupling to a voltage source which provides a DC input voltage, and is configured to generate an output voltage at an output. The driver includes a bidirectional synchronous power converter with a first switch, a second switch, and an inductive device connected to the first and/or second switch. A controller is configured to control the first switch and the second switch. The bidirectional synchronous power converter generates a switching voltage from the input voltage at a switching node and generates the output voltage having an analog voltage waveform with a peak amplitude of at least twice the input voltage.

A dielectric elastomer transducer includes a dielectric elastomer function element having a dielectric elastomer layer and a pair of electrode layers between which the dielectric elastomer function element is interposed, and further includes a supporting body that supports the dielectric elastomer function element. Each of the electrode layers has one or more application regions. The dielectric elastomer function element has one or more function portions on which the application regions of the electrode layers are overlapped. The function portion is spaced away from the supporting body. With such a configuration, it is possible to avoid damaging the electrode layer and acquire a sufficient amount of expansion.