A hybrid electrostatic actuator for use in conjunction with microfluidic devices, microlenses, optical irises and flat panel displays is provided. The hybrid electrostatic actuator includes a substrate having an upper surface and an electrical conductor supported in spaced relation to the substrate. A fluid is received between the substrate and the electrical conductor. An electrostatic generator is configured to selectively apply a variable electrostatic force on the electrical conductor. The application of the variable electrostatic force on the electrical conductor displaces the fluid from between the substrate and the electrical conductor.

A microelectromechanical actuator, comprising: a substrate, having a surface; a conductive beam suspended parallel to the substrate, displaceable along an axis normal to the surface of the substrate; a center electrode on the substrate under the beam; a pair of side electrodes on the substrate configured, when charged, to exert an electrostatic force normal to the surface of the substrate on the beam that repulses the beam from the substrate, and exerts a balanced electrostatic force on the beam in a plane of the surface of the substrate, the center conductive electrode being configured to shield the beam from electrostatic forces induced by the side electrodes from beneath the beam, and the center electrode being configured to have a voltage different from a voltage on the beam, to thereby induce an attractive electrostatic force on the beam.

An artificial muscle includes a housing including an electrode region, an expandable fluid region, a first film layer, and a second film layer. The first film layer and the second film layer each include an inner protective layer having a first elasticity, an outer protective layer having a second elasticity, and a reinforcing layer provided between the inner protective layer and the outer protective layer, the reinforcing layer having a third elasticity greater than the first elasticity of the inner protective layer and the second elasticity of the outer protective layer. The artificial muscle further includes an electrode pair positioned in the electrode region of the housing and between the first film layer and the second film layer, and a dielectric fluid housed within the housing.

A phase light modulator includes a base plate, a mirror, a perforated hinge plate, and first second support posts. The perforated hinge plate supports the mirror. The perforated hinge plate has first and second flexural arms. The perforated hinge plate is configured to move toward or away from the base plate based on application of a potential difference between the base plate and the perforated hinge plate. The first flexural arm is connected to the first support posts, and the second flexural arm is connected to the second support post.

Described is an electrically actuated, pneumatic driven motor. The pneumatic driven motor includes a body having first and second surfaces, the body having a chamber defined by an interior wall, a displacement cavity, and a passage that fluidly couples the displacement cavity to the chamber, a bleeder port and a bleeder port passage that fluidly couples the bleeder port to the chamber, a valve disposed in the passage between the displacement cavity and the chamber, an annular pushrod mechanism coupled to the valve, the annular pushrod mechanism having a pair of pawls that protrude from an inner surface of the annular pushrod mechanism, an axle disposed in the chamber; and a motor gear disposed about the axle, the motor gear having a plurality of teeth that selectively engage with the pawls on the pushrod mechanism according to displacement of the annular pushrod mechanism.

An example electrostatic machine includes a number of stator plates, each having a stator electrode and rotationally fixed to a housing, a shaft at least partially defined within the housing and configured to rotate about an axis, and a number of rotor plates, each having a rotor electrode and rotational fixed to the shaft. The electrostatic machine includes a dielectric fluid disposed in the housing, and that fills a gap between the stator plates and the rotor plates. The electrostatic machine includes a seal associated with the shaft, where the seal includes a material compatible with the dielectric fluid.

A stacked structure is composed of a plurality of layers, and includes: a substrate; a plurality of conductive patterns printed on the substrate; and at least one layer of elastic nodules formed between two layers of the plurality of layers, the layer of elastic nodules including a sensing area being used for at least one of actuation or sensing. The stacked structure is formed by folding the substrate multiple times. The stacked structure further includes: an adhesive layer printed on but not completely covering the conductive patterns and substrate, and forming at least one air reservoir for holding air displaced when the sensing area is compressed. The stacked structure does not include electrically conducting through holes or electrically connecting structures.

A transducer device includes a first dielectric layer, a first electrode layer and a second electrode layer that hold the first dielectric layer in a thickness direction, a second dielectric layer provided continuously from the first dielectric layer, a third electrode layer and a fourth electrode layer that hold the second dielectric layer in the thickness direction, and a controller. The controller calculates a command value of voltage to be applied to the first electrode layer and the second electrode layer and applies a voltage corresponding to the command value to the first electrode layer and the second electrode layer so that the first dielectric layer is deformed in the thickness direction. The controller measures a capacitance Cs of the second dielectric layer via the third electrode layer and the fourth electrode layer and calculates the command value in reference to the measured capacitance Cs.

Hydraulically-amplified, self-healing, electrostatic transducers that harness electrostatic and hydraulic forces to achieve various actuation modes. Electrostatic forces between electrode pairs of the transducers generated upon application of a voltage to the electrode pairs draws the electrodes in each pair towards each other to displace a liquid dielectric contained within an enclosed internal cavity of the transducers to drive actuation in various manners. The electrodes and the liquid dielectric form a self-healing capacitor whereby the liquid dielectric automatically fills breaches in the liquid dielectric resulting from dielectric breakdown. Due to the resting shape of the cavity, a zipping-mechanism allows for selectively actuating the electrodes to a desired extent by controlling the voltage supplied.

A soft-bodied actuator can be configured to be in a pinched or contracted configuration when power is not supplied to the actuator. Thus, a supply of electrical energy is not needed to maintain the actuator in the pinched or contracted configuration. The actuator can include a central bladder. The central bladder can include a flexible casing that defines a central fluid chamber. The central fluid chamber can include a dielectric fluid. A first conductor and a second conductor can be operatively connected to opposite portions of the central bladder. The actuator can be configured such that, in the activated mode, the first and second conductors receive electrical energy from a power source such that they are like charged, causing the first and second conductors to repel each other. The central fluid chamber can include a particulate material to help maintain the central bladder in the pinched configuration.