An example apparatus including a rotor stage of an electrostatic machine, the rotor stage including a rotor plate, at least one rotor via, a rotor power distribution board including at least one rotor power distribution bus, at least one rotor power coupling perforation, and a rotor electrical coupling circuit; a stator stage of the electrostatic machine, the stator stage including a stator plate, at least one stator via, a stator power distribution board including at least one stator power distribution bus, at least one stator power coupling perforation; and a stator electrical coupling circuit structured to electrically couple the at least one stator power distribution bus to at least a portion of the plurality of stator electrodes, wherein the stator electrical coupling circuit extends through the at least one stator via and the at least one stator power coupling perforation.

Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

An electrostatic-type transducer (1) includes: an insulator sheet (11) formed of an elastomer; a plurality of first electrode sheets (12, 13, 14) which is arranged on a front surface side of the insulator sheet (11), adhered to the insulator sheet (11) by fusion of the insulator sheet (11), and arranged with a distance from each other in the surface direction of the insulator sheet (11); and one second electrode sheet (15) which is disposed on the back surface side of the insulator sheet (11) and adhered to the insulator sheet (11) by fusion of the insulator sheet (11), and in which portions facing the plurality of first electrode sheets (12, 13, 14) and portions facing each region between the adjacent first electrode sheets (12, 13, 14) in the surface direction are formed integrally.

An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.

Systems and methods for modified dimensions, configurations, and structure for rotor electrodes and stator electrodes to improve power transfer between such electrodes. Swept-forward, swept-backward, and Yin-Yang shaped electrodes can be used to shift the power response of the motor forwards or backwards in the rotation of the rotor electrode. Modifying the leading edge of the rotor electrode and/or the pitches of the rotor and/or stator electrodes relative to one another may be used to further change various characteristics of the motor, including the power transfer efficiency, the relative locations of the peak overlap between electrodes, and locations of maximum and minimum mechanical strain on the rotors. A curved power feed structure associated with the rotor electrode may be used to distribute the electric charges over a larger area and protect against arcing from the rotor electrode.

An actuator is configured such that a first film body and a second film body are stacked on each other. The first film body includes a first dielectric elastomer film and a first electrode layer provided on a surface of the first dielectric elastomer film. The second film body includes a second dielectric elastomer film and a second electrode layer provided on a surface of the second dielectric elastomer film. The electrode layer included in at least one of the first film body and the second film body includes a plurality of linear electrodes extending in a first direction and provided at intervals in a second direction that is orthogonal to the first direction.

An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

A device may include a primary electrode, a secondary electrode overlapping at least a portion of the primary electrode, and an electroactive polymer element disposed between and abutting the primary electrode and the secondary electrode. The electroactive polymer element may include a nanovoided polymer material whereby resistance to deformation of the electroactive polymer element is non-linear with respect to an amount of deformation of the electroactive polymer element. Various other devices, method, and systems are also disclosed.

An actuator includes a first enclosure, a dielectric fluid in the first enclosure, and a second enclosure in fluid communication with the first enclosure. An elastic membrane defines at least a portion of the second enclosure. A first electrical conductor is positioned along a first side of the first enclosure. A second electrical conductor is positioned along a second side of the first enclosure opposite the first side. The second conductor is spaced apart from the first conductor. The conductors are connected to a power source. Application of electrical energy to the first and second conductors produces an attractive force between the conductors. Motion of the conductors toward each other pressurizes the dielectric fluid so as to force the dielectric fluid to flow from the first enclosure into the second enclosure. The flow of the dielectric fluid exerts a force on the elastic membrane which expands the elastic membrane.

An actuator includes a first enclosure, a dielectric fluid in the first enclosure, and a second enclosure in fluid communication with the first enclosure. An elastic membrane defines at least a portion of the second enclosure. A first electrical conductor is positioned along a first side of the first enclosure. A second electrical conductor is positioned along a second side of the first enclosure opposite the first side. The second conductor is spaced apart from the first conductor. The conductors are connected to a power source. Application of electrical energy to the first and second conductors produces an attractive force between the conductors. Motion of the conductors toward each other pressurizes the dielectric fluid so as to force the dielectric fluid to flow from the first enclosure into the second enclosure. The flow of the dielectric fluid exerts a force on the elastic membrane which expands the elastic membrane.