According to various embodiments, a MEMS device includes a substrate, an electrically movable heating element having a first node coupled to a first terminal of a first voltage source and the second node coupled to a reference voltage source, a first anchor anchoring the first node and a second anchor anchoring the second node of the electrically movable heating element to the substrate, and a cavity between the first anchor and the second anchor and between the electrically movable heating element and the substrate.

A vibration power generator configured to generate power by displacement between an electret group having a plurality of electrets and an electrode group having a plurality of electrodes in a relative movement direction in response to an external vibration, includes a casing in which the electret group and the electrode group are disposed, a fixed member in which one of the electret group and the electrode group is disposed, the fixed member being fixed to a side of the casing, and a movable member in which the other of the electret group and the electrode group is disposed. The movable member is disposed in the casing such that the movable member is relatively movable in response to the external vibration while opposed to the fixed member.

The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.

According to various embodiments, a MEMS device includes a substrate, an electrically movable heating element having a first node coupled to a first terminal of a first voltage source and the second node coupled to a reference voltage source, a first anchor anchoring the first node and a second anchor anchoring the second node of the electrically movable heating element to the substrate, and a cavity between the first anchor and the second anchor and between the electrically movable heating element and the substrate.

In this invention, an imaging module and a method for fabricating it are provided. By designing first and second electrodes, a movable part of the second electrode is connected to the flexible part. Upon a voltage being applied to the first and second electrodes, the second electrode moves toward the first electrode, resulting in a stretch and hence a shape change of a flexible part. As a result, the imaging module undergoes a change in terms of focal length, amount of admitted light and/or admissible range of angle of incident light. In particular, a motion controller incorporating the first and second electrodes can be easily fabricated by semiconductor processes to a very small size, making the imaging module very suitable for use in electronic terminals such as mobile phones with confined enclosure spaces.

The present invention relates to an electromechanical transducer capable of arbitrarily varying the amount of deflection of a vibrating membrane for every element. The electromechanical transducer includes a plurality of elements including at least one cell that includes a first electrode and a second electrode opposed to the first electrode with a gap sandwiched therebetween and a direct-current voltage applying unit configured to be provided for each element and to separately apply a direct-current voltage to the first electrodes in each element. The first electrodes and the second electrodes are electrically separated for every element.

The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12) comprising a first electrode (16), a membrane (14) comprising a second electrode (18), wherein the cell has an outer region (22) where the membrane (14) is mounted to the substrate (12) and an inner region (20) inside or surrounded by the outer region (22), wherein the membrane (14) is collapsed to the substrate (12) in a first collapsed annular-shaped region (24) located within the inner region (20).

A variable stiffening device that includes a flexible envelope having a fluid chamber, a dielectric fluid housed within the fluid chamber, and an electrode stack that includes a plurality of electrodes and one or more abrasive strips. The electrode stack is housed within the fluid chamber and is configured to receive voltage. In addition, the one or more abrasive strips are each positioned between adjacent electrodes, such that when voltage is applied to the electrode stack thereby electrostatically drawing adjacent electrodes together, the one or more abrasive strips generate frictional engagement between adjacent electrodes to actuate the variable stiffening device from a relaxed state to a rigid state.

A dielectric elastomer transducer A1 includes a dielectric elastomer layer 2, a pair of electrode layers 3A, 3B sandwiching the dielectric elastomer layer 2, and a support 1 that supports the dielectric elastomer layer 2. The dielectric elastomer layer 2 includes a movable region 21 separated from the support 1 and a fixed region 22 supported by the support 1. A pair of conduction paths 8A, 8B are established that are configured to conduct electricity to the electrode layers 3A, 3B via power cables 4A, 4B and power supply points 6A, 6B at which core wires 41A, 41B of the power cables 4A, 4B are electrically connected, respectively. The power supply points 6A, 6B are separated from the movable region 21 of the dielectric elastomer layer 2. This arrangement improves the durability of the dielectric elastomer transducer.

A variable stiffening device that include a first electrode structure and a second electrode structure. The first electrode structure includes an electrode extension that extends into a cavity defined between an electrode of the first electrode structure and an opposing electrode of the second electrode structure. The first and second electrode structures may be arranged in a load-bearing state by applying a voltage thereto to electrostatically attract the electrode to the opposing electrode to press the electrode extension within the cavity. Friction between the electrode extension and engaging surfaces defining the cavity prevent the electrode extension from slipping within the cavity, thereby maintaining a structural relationship among the components of the first and second electrode structures in response to an application of a load to the variable stiffening device.