An electrostatic machine including a rotor plate comprising a plurality of rotor electrodes, and rotatably fixed to a shaft; a stator plate comprising a plurality of stator electrodes; an excitation circuit electrically coupled to at least one of the rotor plate or the stator plate at a first end, and electrically couplable to exchange power at a second end with a selected one of an electrical power source or an electrical load; wherein the excitation circuit is configured to: in a first motoring mode, provide excitation power to at least one of the rotor plate or the stator plate, wherein the shaft provides positive torque to the load; and in a second generating mode, wherein the shaft receives negative torque from the load, operably couple at least one of the rotor plate or the stator plate to the electrical power source.

A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.

An artificial muscle including a housing, an electrode pair positioned in an electrode region of the housing, the electrode pair including a first electrode and a second electrode, the first electrode and the second electrode each including a pair of tab portions and a bridge portion, the pair of tab portions extending parallel to one another to define a gap portion between the pair of tab portions, the gap portion having a constant gap width extending along a tab length of the pair of tab portions, the bridge portion interconnecting the pair of tab portions, and a dielectric fluid housed within the housing, wherein the electrode pair is actuatable between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state directs the dielectric fluid into an expandable fluid region of the housing.

Wearable actuator systems are disclosed herein. The wearable actuator system may include an active layer comprising a plurality of actuators, each actuator having a deformable shell that defines an enclosed internal cavity, a fluid dielectric contained within the enclosed internal cavity, a first electrode disposed over a first side of the enclosed internal cavity, and a second electrode disposed over a second side of the enclosed internal cavity. The system further includes an interface layer and a fastener, wherein the active layer and the fastener form an enclosed shape having an internal area, and wherein a size of the internal area of the enclosed shape is adjustable using the fastener

An actuator has a plurality of pairs of a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode is configured to deform to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. Each of the pairs is located on the same axis, and adjacent ones of the pairs are connected to each other. The axis intersects with the opposed face of the base electrode of each of the pairs. The base electrode of each of the pairs is divided into a plurality of electrode portions insulated from each other, and the voltage is individually applied to the electrode portions.

An actuator has a flexible electrode that has flexibility and a base electrode of which an opposing surface facing the flexible electrode is covered with an insulation layer, and is configured such that, when a voltage is applied between flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposing surface. The actuator includes a restraining member that restrains the flexible electrode on the base electrode. The flexible electrode has a deforming portion that deforms when a voltage is applied between the electrodes. The deforming portion deforms in a direction of approaching the opposing surface, with the restraining member serving as a support point.

Illustrative embodiments provide an electrostatic actuator and methods of making and operating an electrostatic actuator. The electrostatic actuator comprises a framework and a plurality of electrodes. The framework comprises walls defining a plurality of cells forming an array of cells. The plurality of electrodes comprise an electrode in each cell in the plurality of cells. A gap separates the electrode in each cell from the walls of the cell. The framework is configured to contract in response to an electrical signal applied between the framework and the plurality of electrodes.

An electrode pair is provided including a first electrode and a second electrode. Each of the first electrode and the second electrode have an outer surface, an inner surface, a first end, a second end, and a lead extending outwardly from the first end. The lead has a first width at the first end. The second end of at least one of the first electrode and the second electrode have a recess formed therein having a first terminus and a second terminus. A second width extends between the first terminus and the second terminus of the recess. The recess is defined by a saw-tooth pattern. When the first electrode is positioned on the second electrode, the recess of the at least one of the first electrode is adjacent the lead of the other electrode.

An artificial muscle stack that includes a plurality of artificial muscle layers. Each artificial muscle layer includes one or more artificial muscles having a housing with an electrode region and an expandable fluid region, a dielectric fluid housed within the housing, and an electrode pair having a first and second electrode positioned in the electrode region. The first and second electrodes each include two or more tab portions and two or more bridge portions. The two or more bridge portions interconnects adjacent tab portions. At least one of the first and second electrode includes a central opening positioned between the tab portions and encircling the expandable fluid region. The plurality of artificial muscle layers are arranged such that the expandable fluid region of the artificial muscles of each artificial muscle layer overlaps at least one tab portion of one or more artificial muscles of an adjacent artificial muscle layer.

An electrode pair is provided including a first electrode and a second electrode. Each of the first electrode and the second electrode have an outer surface, an inner surface, a first end, a second end, and a lead extending outwardly from the first end. The lead has a first width at the first end. The second end of at least one of the first electrode and the second electrode have a recess formed therein having a first terminus and a second terminus. A second width extends between the first terminus and the second terminus of the recess. The recess is defined by a saw-tooth pattern. When the first electrode is positioned on the second electrode, the recess of the at least one of the first electrode is adjacent the lead of the other electrode.