A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.

A method for manufacturing a charge pump-based artificial lightning generator comprises the steps of: forming a second electrode on a prepared substrate; forming a negatively charged body having a sponge structure under the second electrode; removing spherical polymer particles from the negatively charged body using a toluene solution; allowing metal particles to penetrate into the negatively charged body; forming a positively charged body in a location which is at a predetermined distance below the negatively charged body in order to generate charges; nano-structuring the surface of the positively charged body; coating the nano-structured surface of the positively charged body with second metal particles; forming a ground layer for charge separation while maintaining a constant distance in the downward direction from one side of the positively charged body; and forming a first electrode for charge accumulation in a location which is at a predetermined distance below the positively charged body. Accordingly, the present invention can be miniaturized, can produce high-output energy from minute energy such as a wind, a vibration, or a sound, and can remarkably reduce costs incurred according to energy collection.

A method for manufacturing a charge pump-based artificial lightning generator comprises the steps of: forming a second electrode on a prepared substrate; forming a negatively charged body having a sponge structure under the second electrode; removing spherical polymer particles from the negatively charged body using a toluene solution; allowing metal particles to penetrate into the negatively charged body; forming a positively charged body in a location which is at a predetermined distance below the negatively charged body in order to generate charges; nano-structuring the surface of the positively charged body; coating the nano-structured surface of the positively charged body with second metal particles; forming a ground layer for charge separation while maintaining a constant distance in the downward direction from one side of the positively charged body; and forming a first electrode for charge accumulation in a location which is at a predetermined distance below the positively charged body. Accordingly, the present invention can be miniaturized, can produce high-output energy from minute energy such as a wind, a vibration, or a sound, and can remarkably reduce costs incurred according to energy collection.

An inverse electrowetting harvesting and scavenging circuit includes a first substrate having first and second surfaces. An electrode is formed proximate the first surface and includes an insulating layer covering a surface of the electrode. An electromechanical systems device includes a moveable mass extending over the first surface of the first substrate that may be displaced relative to the first substrate in three dimensions responsive to external forces applied to the moveable mass. The movable mass includes a moveable electrode and a conductive fluid is positioned between the insulating layer of the electrode and the movable electrode. Energy harvesting and scavenging circuitry is electrically coupled to the moveable electrode the electrode and is configured to provide electrical energy responsive to electrical energy generated by the moveable electrode, conductive fluid and the electrode through the reverse electrowetting phenomena due to movement of the moveable electrode relative to the electrode and to the conductive fluid on top of the electrode.

An inverse electrowetting harvesting and scavenging circuit includes a first substrate having first and second surfaces. An electrode is formed proximate the first surface and includes an insulating layer covering a surface of the electrode. An electromechanical systems device includes a moveable mass extending over the first surface of the first substrate that may be displaced relative to the first substrate in three dimensions responsive to external forces applied to the moveable mass. The movable mass includes a moveable electrode and a conductive fluid is positioned between the insulating layer of the electrode and the movable electrode. Energy harvesting and scavenging circuitry is electrically coupled to the moveable electrode the electrode and is configured to provide electrical energy responsive to electrical energy generated by the moveable electrode, conductive fluid and the electrode through the reverse electrowetting phenomena due to movement of the moveable electrode relative to the electrode and to the conductive fluid on top of the electrode.

An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

Disclosed is a power-generating backlit trim strip for a vehicle, comprising an oscillation system (3, 4; 3, 14), an induction unit (2), a sensor (17) and a control unit (8). The oscillation system (3, 4; 3, 14) includes a movably arranged gyrating mass (3), and the induction unit (2) is used for inductively converting kinetic energy of the gyrating mass (3) into electricity. The sensor (17) is used for determining a frequency of the vehicle vibrations, and the control unit (8) is used for adjusting the resonant frequency of the oscillation system (3, 4; 3, 14) to a determined frequency of the vehicle vibrations.

Disclosed is a power-generating backlit trim strip for a vehicle, comprising an oscillation system (3, 4; 3, 14), an induction unit (2), a sensor (17) and a control unit (8). The oscillation system (3, 4; 3, 14) includes a movably arranged gyrating mass (3), and the induction unit (2) is used for inductively converting kinetic energy of the gyrating mass (3) into electricity. The sensor (17) is used for determining a frequency of the vehicle vibrations, and the control unit (8) is used for adjusting the resonant frequency of the oscillation system (3, 4; 3, 14) to a determined frequency of the vehicle vibrations.

Systems and apparatuses are provided for increasing the possible force and/or travel generated in MEMS devices. For example, comb fingers may be utilized to form a strain actuator to generate larger forces. As another example, the force advantage of a parallel plate actuator is leveraged while also leveraging the travel advantage of comb drives to increase force and/or travel capable of being generated. The systems and apparatuses disclosed may utilize one or more comb drives operationally attached to one or more flexures and/or frames.