An actuator having good interlayer adhesion at a lamination interface, good conductivity of an electrode layer, and good smoothness of the electrode layer is provided. The actuator includes a plurality of elastomer layers and a plurality of electrode layers, and the elastomer layers and electrode layers are alternately laminated. The electrode layer contains carbon black, a content of the carbon black in the electrode layer is 10% by mass or more and 20% by mass or less, and a specific surface area of the carbon black is 380 g/m.sup.2 or more and 800 m.sup.2/g or less.

The present disclosure provides a flexible actuator, a manufacturing method thereof, and an electronic device, belongs to the technical field of flexible actuators, and can solve the problems that existing flexible actuators are large in size and complex in control program. The flexible actuator provided by the present disclosure includes: a plurality of flexible actuator units arranged in an array; each of the flexible actuator units includes: a driving circuit layer, and a flexible deformation layer located on a side of the driving circuit layer; the driving circuit layer is configured to provide a control signal for the flexible deformation layer; and the flexible deformation layer is configured to deform under the control of the control signal.

A vibration wave motor includes a driven body, a vibrator including an annular vibration plate and an annular piezoelectric element, and a vibration damping member, which are arranged in sequence, wherein the vibration plate has, on a side facing the driven body, radially extending groove portions at X places, and, when center depths of the groove portions at X places are sequentially denoted by D1 to DX in a circumferential direction, D1 to DX vary along a curve obtained by superposing one or more sine waves, and wherein the vibration plate is locally supported by the vibration damping member in some or all antinode portions of a standing wave occurring when the vibration wave motor is driven.

The present invention relates to a device which can measure, induce, and correct perturbations acting on an electromagnetic (EM) propagation source. Piezoelectric transducers are used to measure and control perturbations within a system to improve operation of an EM source. Perturbation measurements can be used to determine the environmental and system impacts on the EM source. Moreover, measurements can be used to correct or nullify perturbations applied to the EM source, through active or passive means.

A vibration device includes vibration elements arranged side by side in a plane direction of a thin film, and the vibration elements are capable of being controlled in different vibrations respectively. The vibration device includes vibration elements having different frequencies of vibration. Further, the vibration device includes vibration elements having different phases. A vibration unit includes the vibration device and a control part controlling vibration of the vibration elements included in the vibration device. A vibration apparatus includes the vibration device, the control part, and a housing accommodating the vibration device and the control part, and includes a vibration part arranged on an outer surface of the housing and generating vibration caused by the vibration elements included in the vibration device.

A PM signal generator can generate a variable PM signal based on a position of a movable element of a MEMS motor. A bias voltage generator can provide a bias voltage to the MEMS motor. The bias voltage generator can include a reference signal generator that can generate a reference signal that varies based on variation of pulses of the PM signal. The bias voltage can be based on the reference signal.

A regenerative drive system for generating a rotary movement, which is in the form of a direct hub drive and includes an electric machine that works on the piezoelectric principle, more particularly in the form of a swash plate motor is provided. The drive system can be fitted in vehicles such as box trucks, truck tractors and trailer vehicles.

The actuator (2) comprises a piezoelectric actuator element (4), which is 18 connected to an adjusting element (12) for exerting an adjusting movement in the adjusting direction (14). For the transmission of a deflecting movement of the actuator element (4), a housing (6) is formed with a variable-shape displacer (8) enclosed therein. During operation, a deflecting movement of the actuator element (4) is transmitted to the displacer (8), so that the latter is deformed and, as a result of the deformation, performs a yielding movement. The housing (6) in this case forms a guide for the displacer (8), so that the yielding movement of the displacer (8) is oriented in the adjusting direction (14). The adjusting element (12) is also connected to the displacer (8), so that the yielding movement of the displacer (8) is transmitted to the adjusting element (12).

A vibration actuator includes an elastic body on which at least one projection is formed and a vibrating body including an electromechanical conversion device, and drives a driven member that is in contact with a contact portion of the projection by causing an end portion of the projection to perform an ellipsoidal movement in response to a combination of two vibration modes generated in the vibrating body when an alternating driving voltage is applied. The elastic body is formed integrally with the projection and a bonding portion between the projection and the electromechanical conversion device. A space is provided between the contact portion and the electromechanical conversion device to which the projection is bonded. The spring portion is provided between the bonding portion and the contact portion and causes the projection to exhibit a spring characteristic when the contact portion is pressed by the driven member.

There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.