Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

A piezoelectric drive device driving a driven member by a projecting portion provided on one end of a vibrator including a piezoelectric element, includes a fixing portion fixing the piezoelectric drive device, a holding portion holding the vibrator, an urging portion coupled to the fixing portion and urging the holding portion including the vibrator in a direction toward the projecting portion, a weight portion provided at an opposite side to the projecting portion in the holding portion, and an elastic portion placed between the holding portion and the weight portion.

There is disclosed an ultrasonic motor having a vibrator that vibrates by a high frequency drive voltage applied thereto, a sliding member that comes in contact frictionally with the vibrator, pressurizing means for pressurizing the vibrator to the sliding member, a base to which the vibrator is fixed, a vibrator support member holding the base, and coupling means for coupling the vibrator with the vibrator support member, the vibrator and the sliding member being relatively moved by the vibration, wherein the coupling means includes the base, the rolling member that freely moves the base to the vibrator support member in a pressurizing direction of the pressurizing means, and an urging member that urges the rolling member in a direction perpendicular to the pressurizing direction of the pressurizing means.

A vibration type actuator includes a vibrator, including a protrusion and a piezoelectric element, that is arranged to vibrate in response to a voltage, and a contact member having a contact surface which the protrusion contacts. The vibrator and the contact member rotate relative to each other around a first axis. The vibrator is tilted to the contact surface by a predetermined angle.

Servomotor (1) comprising: —a base body (10), —an actuator body (20) which is arranged on the base body (10)—a drive arrangement (40) which is coupled to a drive section of the actuator body (20) and, when the drive arrangement (40) is activated, brings about a movement of the drive section of the actuator body (20) in one of two opposing circumferential directions on the basis of this coupling, —a rotational guide (50) with which the actuator body (20) is rotatably guided on the base body (10) and by which the movement of the drive section of the actuator body (20) is converted into a rotational movement of the actuator body (20), —a resetting arrangement (80) which couples the actuator body (20) and the base body (10) to one another and applies a resetting force between them, which resetting force opposes the actuating movement of the actuator body (20), —a magnet-compensation device (90) which reduces or cancels out the resetting force applied by the resetting device (80).

A motor includes a pressing member pressing a vibrator onto a contacting member, first and second holding members respectively holding the vibrator and a transmission member, which transmits pressing force by the pressing member to the vibrator, and a coupling member coupling the first and second holding members. The vibrator and the contacting member move by vibrations occurring in the vibrator. The coupling member includes a rolling member moving the first and second holding members in a pressing direction of the pressing member, and an urging member, which is held by the second holding member, urging the first and second holding members in parallel with a moving direction of the vibrator and the contacting member. The rolling member is sandwiched between the first and second holding members, and abuts against the first holding member on a center side of the vibrator in the moving direction.

A motor includes a vibrator, a plurality of pressing members that presses the vibrator onto a contacting member in contact with the vibrator, a transmission member that transmits pressing force, which is applied by the plurality of pressing members, to the vibrator, a first holding member that holds the vibrator, a second holding member that holds the transmission member, and a coupling member that couples the first holding member to the second holding member. The vibrator and the contacting member move relatively by vibrations that occur in the vibrator. The vibrator includes a protruding part that is provided on a surface opposite to a surface on a transmission member side. The pressing members are arranged separately to surround the protruding part. The coupling member is arranged at a position closer to the protruding part than the pressing members.

A motor includes a first vibrator, a plurality of biasing parts that are disposed around the first vibrator and that presses the first vibrator onto a contacting member in contact with the first vibrator, a first pressing member that is biased by the plurality of biasing parts and that includes a pressing part pressing the first vibrator by biasing force of the plurality of biasing parts, and a second pressing member that is biased by the plurality of biasing parts. The first vibrator and the contacting member move relatively by vibrations that occur in the first vibrator. The first and second pressing members integrally moves while the first vibrator moves. The first pressing member and the first vibrator are tiltable around a first direction orthogonal to both of a moving direction of the first vibrator and a biasing direction of the plurality of biasing parts.

A motor includes a vibrator, a mover guided by a guide member to move with the vibrator, and rollers sandwiched between the mover and the guide member. The mover includes first and second groove shapes formed along a moving direction of the vibrator to separate from each other. The guide member includes first and second guide parts opposite to the first and second groove shapes, respectively. The rollers are sandwiched among the first and second groove shapes, and the first and second guide parts. On a rear side of a surface of the guide member where the first and second guide parts are formed, the mover includes regulating parts regulating a movement of the guide member to the rear side. When the guide member abuts against the regulating parts, part of each of the rolling balls is positioned inside the first and second groove shapes.

A vibration actuator that is capable of bringing a vibration body into pressure contact with a driven body stably during long time while reducing obstruction of excitation of vibration in the vibration body by the pressure force. The driven body is in contact with the vibration body by pressure force given by a pressing member. A vibration isolation member is arranged between the vibration body and the pressing member. The vibration body and the driven body move relatively by vibrations in first and second vibration modes that are excited in the vibration body by applying alternating voltage to a piezoelectric device on the vibration body. Face pressure that acts to the piezoelectric device by the pressure force from the pressing member in first and second areas that respectively include nodal lines in the first and second vibration modes and their vicinities is higher than that in the other area.