A method is provided of controlling at least two interacting piezoelectric actuators for commonly displacing an object attached thereto. The method comprises the following steps: a. Step A: applying a first cyclic drive voltage signal with a constant frequency to the first piezoelectric actuator, b. Step B: applying a second cyclic drive voltage signal with a constant frequency to said second piezoelectric actuator, whereby the frequencies of the first and second cyclic drive voltage signals are substantially identical and whereby the frequencies of the first and second cyclic drive voltage signals are substantially oppositely phased, and in which at least in a predetermined time period the cyclic drive voltage signals in step A and B are synchronized such that at least one time phase is comprised in which the drive voltage signals of the first and second piezoelectric actuators have both a gradient of decreasing or increasing the respective drive voltage signal having the same sign or one of these gradients is zero and the other is not zero.

Provided is a vibration type driving device enabling multidirectional driving of a moving body while considering a difference in transfer characteristics of the synthesized driving force of a plurality of motors between at least two mutually crossing directions.

A MEMS shutter including: a semiconductor substrate traversed by an aperture; a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers; a plurality of actuators; a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first and second semiconductor layers, the shielding structures being arranged angularly around the underlying aperture so as to provide shielding of the aperture, each shielding structure being further coupled to the supporting structure via a deformable structure. Each actuator may be controlled so as to translate a corresponding shielding structure between a first position and a second position, thus varying shielding of the aperture; the first and second positions of the shielding structures are such that, in at least one operating condition, pairs of adjacent shielding structures at least partially overlap one another.

A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.

A piezoelectric motorization system has a mechanically flexible body that has one or more surfaces for placing piezoelectric actuators. The system has groups of piezoelectric actuators each positioned on one of the surfaces of the mechanically flexible body that is connected to the electronic circuitry. The electronic circuitry controls the driving of the mechanical loads by the mechanically flexible body by injecting sets of control signals into different groups of actuators positioned on the mechanically flexible body. Each control signal operates groups of driving frequencies with an adjustable amplitude ratio and an adjustable phase difference among driving frequencies. And, under a set of boundary conditions exhibited by a set of structural dimensions of the mechanically flexible body, each control signal induces multi-mode resonance of the mechanically flexible body for driving the mechanical loads multi-dimensionally.

A wearable display system includes one or more emissive micro-displays, e.g., micro-LED displays. The micro-displays may be monochrome micro-displays or full-color micro-displays. The micro-displays may include arrays of light emitters. Light collimators may be utilized to narrow the angular emission profile of light emitted by the light emitters. Where a plurality of emissive micro-displays is utilized, the micro-displays may be positioned at different sides of an optical combiner, e.g., an X-cube prism which receives light rays from different micro-displays and outputs the light rays from the same face of the cube. The optical combiner directs the light to projection optics, which outputs the light to an eyepiece that relays the light to a user's eye. The eyepiece may output the light to the user's eye with different amounts of wavefront divergence, to place virtual content on different depth planes.

A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.

Disclosed is a thermo-mechanical actuator (100) comprising a piezo¬electric module (110), the piezo-electric module comprising at least one piezo-electric element (120), wherein the thermo-mechanical actuator is configured to: receive a thermal actuation signal (132) for controlling a thermal behaviour of the piezo-electric module, or provide a thermal sensing signal (132) representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: receive a mechanical actuation (134) signal for controlling a mechanical behaviour of the piezo-electric module, or provide a mechanical sensing signal (134) representative of a mechanical state of the piezo-electric module.

A light deflector includes a mirror part, a pair of torsion bars, inside piezoelectric actuators, and a movable frame part. The crystal orientation in the axial direction of the torsion bars is set to <100>. In the joint edge portions of the torsion bars and the inside piezoelectric actuators, radius parts are oriented to <110> and each formed by a curved surface recessed inward. The amount of waviness about a roughness curve derived from the curved surface is set within 600 nm.

An electrical connection structure for connecting a piezoelectric element and an electrical circuit to each other with a conductive adhesive is described. The electrical connection structure includes an epoxy, a conductive component surrounded by the epoxy, and a trace feature implemented on top of the electrical connection structure.