Provided is a novel actuator that can easily achieve movement with multiple degrees of freedom. An actuator includes a flexible electrode, a first base electrode disposed to face the flexible electrode on the Y-axis and provided with a first insulating layer on an opposite face, a second base electrode disposed to face the flexible electrode on the X-axis and provided with a second insulating layer on an opposite face, and a first output member and a second output member adapted to be displaced according to deformation of the flexible electrode. A first space is formed between the first insulating layer and the flexible electrode, in which the flexible electrode deforms toward the first insulating layer by an applied voltage. A second space is formed between the second insulating layer and the flexible electrode, in which the flexible electrode deforms toward the second insulating layer by an applied voltage.

An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

A driving circuit for driving a piezoelectric load, can include: a rechargeable power supply; a power stage circuit coupled between the rechargeable power supply and the piezoelectric load; where during a first operation interval of an operation period, the rechargeable power supply charges the piezoelectric load through the power stage circuit, such that a power supply voltage signal provided to the piezoelectric load in the first operation interval corresponds to a reference voltage in a first interval; and where during a second operation interval of the operation period, the piezoelectric load charges the rechargeable power supply through the power stage circuit, such that the power supply voltage signal in the second operation interval corresponds to the reference voltage in a second interval.

An optical device includes a first reflector; a second reflector; an elastic support unit supporting the second reflector; a piezoelectric element on the elastic support unit; a light emitter configured to emit light having an oscillation wavelength; and circuitry configured to output a signal to apply drive voltage to the piezoelectric element to elastically deform the elastic support unit. The deformation of the elastic support unit changes a distance between the first reflector and the second reflector to change the oscillation wavelength of the light emitted from the light emitter.

A lens driving device according to an embodiment includes a moving part including a lens; a driving part for driving the moving part in an optical axis direction; and a sensing part for sensing a position of the moving part; wherein the moving part includes: a magnet scaler in which a first pole and a second pole are alternately arranged in a first direction; and a reference magnet corresponding to the magnet scaler and having a first pole and a second pole disposed in a second direction perpendicular to the first direction.

A processor applies a first driving signal having a first driving frequency to a first actuator, applies a second driving signal having a second driving frequency to a second actuator, generates a first angle detection signal by performing first frequency filter processing based on the first driving frequency on an output signal of a first angle detection sensor, generates a second angle detection signal by performing second frequency filter processing based on the second driving frequency on an output signal of a second angle detection sensor, derives a first angle, which is an angle of a mirror portion around a first axis, based on the first angle detection signal, derives a second angle, which is an angle of the mirror portion around a second axis, based on the second angle detection signal, adjusts the first driving signal based on the first angle, and adjusts the second driving signal based on the second angle.

A processor applies a first driving signal having a first driving frequency to a first actuator, applies a second driving signal having a second driving frequency to a second actuator, generates a first angle detection signal by performing first frequency filter processing based on the first driving frequency on an output signal of a first angle detection sensor, generates a second angle detection signal by performing second frequency filter processing based on the second driving frequency on an output signal of a second angle detection sensor, derives a first angle, which is an angle of a mirror portion around a first axis, based on the first angle detection signal, derives a second angle, which is an angle of the mirror portion around a second axis, based on the second angle detection signal, adjusts the first driving signal based on the first angle, and adjusts the second driving signal based on the second angle.

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.

A vibration type actuator includes a vibrating body including an elastic body and an electro-mechanical energy conversion element, a contact body contacting the vibrating body, a flexible printed board provided with a concave portion on a surface opposite to a surface contacting the electro-mechanical energy conversion element and configured to supply electric power to the electro-mechanical energy conversion element, and a holding member provided with a projection portion engaging with the concave portion.

A vibration type actuator includes a vibrating body including an elastic body and an electro-mechanical energy conversion element, a contact body contacting the vibrating body, a flexible printed board provided with a concave portion on a surface opposite to a surface contacting the electro-mechanical energy conversion element and configured to supply electric power to the electro-mechanical energy conversion element, and a holding member provided with a projection portion engaging with the concave portion.