A piezoelectric drive apparatus for a motor, the apparatus including a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction, a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode, and a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body, wherein the longitudinal direction of the substrate roughly coincides with a direction in which Young's modulus is minimized in a plane of the substrate.

A gimbal mount for a sensor having an outer and inner gimbal mount to stabilize vibrations in a wide frequency band without having to statically balance the sensor. A direct drive is provided for at least one drive of an outer axis of rotation of the outer gimbal mount and an amplified piezo actuator is provided for at least one drive of an inner axis of rotation of the inner gimbal mount. The at least one outer axis of rotation is provided for vibration stabilization in a first range of the frequency band to be stabilized and the at least one inner axis of rotation stabilization is provided for vibration stabilization in a second range in the frequency band to be stabilized. The outer gimbal mount and the inner gimbal mount are embodied as mechanically rigid constructions which transmit vibrations in the frequency band to be stabilized essentially without damping.

A piezoelectric drive device includes a vibrating body, a support portion formed integrally with the vibrating body, and a piezoelectric element formed of a first electrode film, a piezoelectric body film, and a second electrode film on at least one surface of the vibrating body.

A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.

A vibration module and an optical deflector can suppress a change in deflection angle of a movable part due to a change in static displacement of a piezoelectric body associated with a temperature change. The vibration module includes a drive element and a substrate supporting the drive element. The drive element includes a movable part, a drive unit that includes a piezoelectric body as a drive source and rotates the movable part about a rotation axis, and a fixing part that supports the movable part and the drive unit and is bonded to the substrate. The fixing part is bonded to the substrate at a plurality of portions discrete from each other with an adhesive whose elastic modulus decreases as a temperature rises, and the plurality of portions include a portion corresponding to an antinode of vibration generated in the fixing part when the movable part is resonantly driven.

This application discloses a camera module including a bracket, where the bracket is provided with a groove; a drive member, where the drive member is disposed on a first side of the bracket; a transmission member, where the transmission member is disposed on an inner wall of the groove, and the transmission member is electrically connected to the drive member; and a lens module, where at least part of the lens module is disposed in the groove, the lens module is movably connected to the transmission member, and the transmission member is configured to drive the lens module to move.