Methods and apparatus using a matching network for processing a substrate are provided herein. For example, a matching network configured for use with a plasma processing chamber comprises a local controller connectable to a system controller of the plasma processing chamber, a first motorized capacitor connected to the local controller, a second motorized capacitor connected to the first motorized capacitor, a first sensor at an input of the matching network and a second sensor at an output of the matching network for obtaining in-line RF voltage, current, phase, harmonics, and impedance data, respectively, and an Ethernet for Control Automation Technology (EtherCAT) communication interface connecting the local controller to the first motorized capacitor, the second motorized capacitor, the first sensor, and the second sensor.

A method for controlling reflected power in a plasma processing system is provided, including: applying RF power from a first generator to an ESC; applying RF power from a second generator to an edge electrode that surrounds the ESC and is disposed below an edge ring that surrounds the ESC, the RF power from the second generator having a voltage set based on the amount of use of the edge ring, wherein the second generator automatically introduces a phase adjustment so that a phase of the RF power from the second generator substantially matches a phase of the RF power from the first generator; and, adjusting a variable capacitor of a match circuit through which the RF power from the second generator is applied to tune the phase adjustment to a target phase adjustment setting.

The present disclosure, calculating an impedance change considering a reflected wave due to IMD, provides an impedance matching device for performing impedance matching between a source power supply side and a load side, including: a detector that detects a forward wave power supplied from the source power supply and a reflected wave power from the load and outputs a forward wave voltage as a component of the forward wave power and a reflected wave voltage as a component of the reflected wave power, an impedance information output part that calculates impedance from the forward wave voltage and the reflected wave voltage, and a matching part that performs matching operation based on an impedance value supplied from the impedance information output part. The impedance information output part complexifies each of the forward wave voltage and the reflected wave voltage to calculate an impedance value to generate an impedance locus.

The present disclosure, calculating an impedance change considering a reflected wave due to IMD, provides an impedance matching device for performing impedance matching between a source power supply side and a load side, including: a detector that detects a forward wave power supplied from the source power supply and a reflected wave power from the load and outputs a forward wave voltage as a component of the forward wave power and a reflected wave voltage as a component of the reflected wave power, an impedance information output part that calculates impedance from the forward wave voltage and the reflected wave voltage, and a matching part that performs matching operation based on an impedance value supplied from the impedance information output part. The impedance information output part complexifies each of the forward wave voltage and the reflected wave voltage to calculate an impedance value to generate an impedance locus.

A wireless power transmitting device includes: a transistor configured to output a signal corresponding to a set operating frequency, based on an input signal and a driving voltage; a matching circuit connected with the transistor; a transmission coil connected with the matching circuit; an LC resonance circuit connected in parallel between the transistor and the matching circuit and configured to transfer a signal corresponding to at least one harmonic frequency of the operating frequency; and an impedance sensing circuit connected with the LC resonance circuit and configured to sense a load impedance of the wireless power transmitting device based on the signal corresponding to the at least one harmonic frequency transferred through the LC resonance circuit. The matching circuit is configured to provide impedance matching with the sensed load impedance by adjusting an impedance of the matching circuit or an impedance of the transmission coil.

A wireless power transmitting device includes: a transistor configured to output a signal corresponding to a set operating frequency, based on an input signal and a driving voltage; a matching circuit connected with the transistor; a transmission coil connected with the matching circuit; an LC resonance circuit connected in parallel between the transistor and the matching circuit and configured to transfer a signal corresponding to at least one harmonic frequency of the operating frequency; and an impedance sensing circuit connected with the LC resonance circuit and configured to sense a load impedance of the wireless power transmitting device based on the signal corresponding to the at least one harmonic frequency transferred through the LC resonance circuit. The matching circuit is configured to provide impedance matching with the sensed load impedance by adjusting an impedance of the matching circuit or an impedance of the transmission coil.

A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.

A radio-frequency system including: a self-complementary antenna characterized by an input impedance substantially independent of signal frequency across an operational frequency band; a passive coupling device characterized by a characteristic impedance and configured to couple the self-complementary antenna to a signal generator and a set of signal processors; a resistive matching network electrically connected between the self-complementary antenna and the passive coupling device configured to match the characteristic impedance of the passive coupling device to the input impedance of the self-complementary antenna; and a back-coupling line characterized by a substantially constant group delay across the operational frequency band configured to electromagnetically couple the signal generator to the set of signal processors.

A radio-frequency system including: a self-complementary antenna characterized by an input impedance substantially independent of signal frequency across an operational frequency band; a passive coupling device characterized by a characteristic impedance and configured to couple the self-complementary antenna to a signal generator and a set of signal processors; a resistive matching network electrically connected between the self-complementary antenna and the passive coupling device configured to match the characteristic impedance of the passive coupling device to the input impedance of the self-complementary antenna; and a back-coupling line characterized by a substantially constant group delay across the operational frequency band configured to electromagnetically couple the signal generator to the set of signal processors.