Embodiments of resonator circuits and modulating resonators and are described generally herein. One or more acoustic wave resonators may be coupled in series or parallel to generate tunable filters. One or more acoustic wave resonances may be modulated by one or more capacitors or tunable capacitors. One or more acoustic wave modules may also be switchable in a filter. Other embodiments may be described and claimed.

Embodiments of resonator circuits and modulating resonators and are described generally herein. One or more acoustic wave resonators may be coupled in series or parallel to generate tunable filters. One or more acoustic wave resonances may be modulated by one or more capacitors or tunable capacitors. One or more acoustic wave modules may also be switchable in a filter. Other embodiments may be described and claimed.

An RF impedance measurement circuit includes a sensing capacitor connectable with an RF signal path; a first amplitude detector and a first frequency divider, each coupled, with the measurement circuit in operation, to the RF signal path at a first terminal of the sensing capacitor; a second amplitude detector and a second frequency divider, each coupled, with the measurement circuit in operation, to a second terminal of the sensing capacitor; and a phase detection circuit connected to an output of the first frequency divider and to an output of the second frequency divider.

An RF impedance measurement circuit includes a sensing capacitor connectable with an RF signal path; a first amplitude detector and a first frequency divider, each coupled, with the measurement circuit in operation, to the RF signal path at a first terminal of the sensing capacitor; a second amplitude detector and a second frequency divider, each coupled, with the measurement circuit in operation, to a second terminal of the sensing capacitor; and a phase detection circuit connected to an output of the first frequency divider and to an output of the second frequency divider.

In one embodiment, a method of using an impedance matching network to determine a plasma chamber characteristic is disclosed. An impedance matching network is coupled between a radio frequency (RF) source and a plasma chamber. The matching network includes a variable reactance element (VRE) having different positions for providing different reactances. A characteristic of the plasma chamber is determined based on reference values for a parameter of the matching network and a current value. Based thereon, either a visual or audible indication of the determined characteristic of the plasma chamber is provided, or an action is taken to address the determined characteristic.

In one embodiment, a method of using an impedance matching network to determine a plasma chamber characteristic is disclosed. An impedance matching network is coupled between a radio frequency (RF) source and a plasma chamber. The matching network includes a variable reactance element (VRE) having different positions for providing different reactances. A characteristic of the plasma chamber is determined based on reference values for a parameter of the matching network and a current value. Based thereon, either a visual or audible indication of the determined characteristic of the plasma chamber is provided, or an action is taken to address the determined characteristic.

An impedance matching network including a mixing module. The mixing module receives a plurality admittances based upon at least one parameter sensed from an output which generated by an RF generator. The output signal is a pulsed RF signal having a plurality of states for each pulse and the plurality of admittances correspond to the plurality states. The mixing module generates a virtual admittance determined in accordance with the plurality of admittances adjusted by a gain. The impedance matching module receives the virtual admittance and generates a command to adjust a capacitance of the impedance matching network or a command to adjust a frequency of the output signal in accordance with the virtual admittance.

A wireless transmission system comprises an antenna component, a wireless module including a processing unit and a power controlling unit, a tuner connected between the antenna component and the wireless module, and a sensor connected to the wireless module. The tuner is configured to adjust an output bad of the power controlling unit according to a received signal strength indication of the wireless transmission system being greater than a predetermined threshold value, such that multiple different load values are provided for the power controlling unit. The sensor is configured to detect and record a current consumption value corresponding to each load value. In response to the wireless module emitting signals via the antenna component, the processing unit selects the load value corresponding to the lowest of the current consumption values and applies the selected load value to the output load of the power controlling unit.

A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.

A power supply includes an inverter configured to direct current (DC) power into alternating current (AC) power, an impedance matching circuit configured to supply the AC power to a load; and a controller configured to adjust disposition of a powering period, in which the AC power is output, and a freewheeling period, in which the AC power is not output, to adjust a power amount of the power supplied to the load through the impedance matching circuit by the inverter.