In one embodiment, an impedance matching network includes a variable reactance circuit providing a variable capacitance or inductance. The variable reactance circuit includes reactance components and corresponding switching circuits. Each of the switching circuits includes a diode and a driver circuit to switch the diode. The driver circuit includes first and second switches coupled in series. A first driver is coupled to the first switch, a second driver is coupled to the second switch, and a third driver is coupled to the first and second drivers. The third driver provides a first signal to the first driver, and a second signal to the second driver. In providing the signals, the third driver increases and decreases a duration of a dead time between (a) driving the first driver on and the second driver off, or (b) driving the second driver on and the first driver off.

In one embodiment, an impedance matching network includes a variable reactance circuit providing a variable capacitance or inductance. The variable reactance circuit includes reactance components and corresponding switching circuits. Each of the switching circuits includes a diode and a driver circuit to switch the diode. The driver circuit includes first and second switches coupled in series. A first driver is coupled to the first switch, a second driver is coupled to the second switch, and a third driver is coupled to the first and second drivers. The third driver provides a first signal to the first driver, and a second signal to the second driver. In providing the signals, the third driver increases and decreases a duration of a dead time between (a) driving the first driver on and the second driver off, or (b) driving the second driver on and the first driver off.

Embodiments of a circuit, system, and method are disclosed. A beam switch to a beam with a beam configuration from another beam with another beam configuration is detected. In response to the detected beam switch: a tuner setting is determined for an antenna tuner of an antenna element in an antenna array which transmits the first beam with the first beam configuration based on the first beam configuration, the tuner setting associated with the first beam configuration; and an indication of the tuner setting is provided to an impedance matching system of the antenna tuner to compensate for a mismatch between an impedance of the antenna element and impedance of one or more other radio frequency (RF) components of an RF front-end having the antenna element and antenna tuner.

A substrate processing system includes a drive circuit, an RF reference measuring circuit, and a make-break connector. The drive circuit generates an RF drive signal at a first RF frequency. The RF reference measuring circuit includes an LC circuit having an input impedance and an output impedance. An output of the LC circuit connects to an RF power meter and a dummy load. The make-break connector connects the drive circuit to one of the RF reference measuring circuit and a processing chamber load including a component of the substrate processing system. An output impedance of the drive circuit matches an impedance of an input impedance of the LC circuit. The output impedance of the drive circuit does not match impedances of the RF power meter and the dummy load. The LC circuit matches the impedance of the drive circuit to the RF power meter and the dummy load.

A fast calibration method for slide-screw impedance tuners employs a new tuner control board and routine with independent direct triggering and data sampling by the VNA; a new vertical scaling algorithm bypasses the traditional iterative approach and uses numerical curve-fitting and ISO circle definition. Full tuner calibration executes without motor stopping, yielding time reduction typically by a factor of 8.

A fast calibration method for slide-screw impedance tuners employs a new tuner control board and routine with independent direct triggering and data sampling by the VNA; a new vertical scaling algorithm bypasses the traditional iterative approach and uses numerical curve-fitting and ISO circle definition. Full tuner calibration executes without motor stopping, yielding time reduction typically by a factor of 8.

An antenna structure includes a first antenna, a second antenna, at least one processor, a power distribution circuit configured to equally supply power supplied from the processor(s) to the first antenna and the second antenna, and a coupler disposed between the processor(s) and the power distribution circuit, wherein the processor(s) may obtain a first parameter for a first signal received by the first antenna and a second parameter for a second signal received by the second antenna, detect a phase difference between the first signal and the second signal, obtain a matching parameter based on parameters corresponding to a case in which the phase difference satisfies a specified condition among the first parameter and the second parameter, and obtain a third parameter for allowing a reflection coefficient of a signal flowing from the power distribution circuit to the coupler to exist within a specified range among the matching parameters.

A circuit device includes a directional coupler with a first port receiving a radiofrequency signal, a second port outputting a signal in response to signal received by the first port, and a third port outputting a signal in response to a reflection of the signal at the second port. An impedance matching network is connected between the second port and an antenna. The impedance matching network includes fixed inductive and capacitive components and a single variable inductive or capacitive component. A diode coupled to the third port of the coupler generates a voltage at a measurement terminal which is processed in order to select and set the inductance or capacitance value of the variable inductive or capacitive component.

Provided is an impedance matching device capable of promptly improving an impedance mismatch between a high-frequency power source and a load even when the impedance of the load continuously changes. An impedance matching device according to the present invention is for use in a high-frequency power system configured to supply a load with an output from a high-frequency power source via a matching circuit whose constant is mechanically changed, and the impedance matching device includes a matching condition value acquisition portion for acquiring a matching condition value indicating a matching condition between the high-frequency power source and a load, and a control portion for controlling an oscillation frequency of the high-frequency power source based on the matching condition value. When the matching condition value indicates deterioration of the matching condition, the control portion changes the oscillation frequency with a first slope toward improving the matching condition, and thereafter shifts the oscillation frequency back to an original value with a second slope more gradual than the first slope.

Technologies directed to a wireless device with RF port impedance detection using concurrent radios are described. One wireless device includes an impedance detection circuit with a bi-directional RF coupler and switching circuitry. A processing device at least two radios, at least two RF ports, and an impedance detection circuit. The impedance detection circuit is configured to measure a first receive signal strength indicator (RSSI) value of a first reflected signal. The first reflected signal corresponding to a first signal sent by one of the at least two radios. The impedance detection circuit determines that the first RSSI value exceeds a threshold. The threshold represents an impedance mismatch condition at or beyond at least one of the two RF ports. The processing device sends a first indicative of the impedance mismatch condition to a second device.